Macquarie Semiconductor and Technology on behalf of Confidential Seller
The images and data contained herein is owned by Macquarie and is intended for use only by potential purchasers of goods shown herein. Except for such permitted usage, no other use of the images and data is permitted and such images and data shall not be exhibited or shown in any websites or social media or for any commercial purposes without Macquarie’s written permission. Therefore, no seller of goods like the goods shown herein has any right or authority to show or exhibit any images or data shown herein.
Date of Manufacture: 2016-01-01
Currently Configured for: 150mm
Current Equipment Status: Incoming
Location of Equipment: Durham, United States
Available date: TBD
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Applied Materials – Implant Division |
HC, LE |
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Eaton – Semiconductor Equipment Operations (Note: Also Sumitomo Eaton Nova, Japanese only models) |
MC, HC, LE, HE |
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Varian – Semiconductor Equipment Associates (Note: Also Tokyo Electron Limited, Japanese only models) |
MC, HC, LE, HE |
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Genus (Note: Now owned by Varian) |
HE |
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IBIS (Note: Oxygen Implanters) |
S |
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Nissin (Note: Japanese only models) |
MC |
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6. Wafer size: |
150mm |
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8. Note any options installed: |
High Temp Implant (ESC) |
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9. Note any upgrades installed: | |
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10. Operational: |
Yes |
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11. Under OEM service contract: |
Yes |
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12. Overall condition: |
Excellent |
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13. Gas Box Configuration: |
BF3, PF3, PH3 |
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14. Source Type and Species: |
Independent Heated Cathode (Gas, Al) |
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15. Electrical Requirements: |
208V 3Ph |
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16. CE Mark Certified: |
Yes |
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17. Decontaminated: |
Yes |
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18. De-installed By: |
Nissin |
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20. List any Know Issues or Missing Parts: |
Source pump exhaust / Forelines removed due to contamination. |
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Focus Power Supply packed separately |
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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