Macquarie Semiconductor and Technology on behalf of ON Semiconductor Czech Republic s.r.o.
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Etch/Ash/Clean - Plasma Processing
Date of Manufacture:
Currently Configured for: 150mm
Current Equipment Status: Available
Location of Equipment: Czech Republic
Available date: Currently Available
| Install Type | Through-the-wall | ||||
| Software Type | Lam Envision | ||||
| Software Version | E 1.5.2 | ||||
| Is System On-Line? | No | ||||
| CE Mark Certified? | No | ||||
| SECS Interface | Yes | ||||
| Electrical Requirements | 208V/80A | ||||
| OEM Audit Available? | No | ||||
| Decontamination Report Exists? | No | ||||
| Can Produce Wafers AS IS? | Yes | ||||
| Any Known Field Modifications? | No | ||||
| All Cables Present? | Yes | ||||
| Gas Panel Type | Standard | ||||
| Etcher Mainframe Type | |||||
| Stand Alone | X | ||||
| PM 1 / Main Chamber | Metal Etch | ||||
| Key Stand Alone Mainframe Items | |||||
| Equipe Autoloader | No | ||||
| Built-In Hepa Filter | No | ||||
| Orbitally Welded Gas Box | Yes | ||||
| Backside Helium Cooling | Yes | ||||
| Helium Cooling MFC Type | UNIT UPC8130 | ||||
| Heated Pumping Manifolds | Yes | ||||
| On-Board RF Generators | Yes | ||||
| Remote RF Cart | No | ||||
| Remote Gas Box | No | ||||
| Main On-Board AC Distribution Type | Fused | ||||
| Remote AC Box | No | ||||
| WVDS | Yes | ||||
| DSQ Type | Hinged | ||||
| Hine 38A Indexers | Yes | ||||
| Endpoint Detection System | Yes | ||||
| Endpoint Type | Monochromators | ||||
| Endpoint Lam Part Number | 830-330546-001 | ||||
| Chamber Liner Present | Yes | ||||
| Chamber Anodization Condition | Good | ||||
| Electrode Gap | Fixed Gap | ||||
| Wafer Clamp | ESC | ||||
| ESC Type | Polyamid | ||||
| Gate Valve Mfg, Model/Type | Pendulum | ||||
| TCP Coil Size | 6” | ||||
| Chiller Information | |||||
| Manufacturer | Edwards | ||||
| Model | TCU40/80 | ||||
| Electrical Requirements | 200/208VAC/ 25A | ||||
| # of Cooling Channels | One | ||||
| Quantity Required | 1 | ||||
| Included With System | Yes | ||||
| Gas Line # | Gas | Flow (sccm) | MFC Mfgr. | MFC Model | |
| 1 | Cl2 | 100 | UNIT | 1660 | |
| 2 | BCl3 | 100 | UNIT | 1660 | 1660 |
| 3 | SF6 | 100 | UNIT | 1661 | |
| 4 | N2 | 20 | UNIT | 1660 | |
| 5 | O2 | 500 | UNIT | 1660 | |
| 6 | Ar | 100 | UNIT | 1660 | |
| 7 | O2 | 1200 | UNIT | 1660 | |
| 8 | CF4 | 100 | UNIT | 1660 | |
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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