Macquarie Semiconductor and Technology on behalf of Micron Memory Japan, K.K. (F15)
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Etch/Ash/Clean - Plasma Processing
Date of Manufacture: 2015-01-01
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Hiroshima, Japan
Available date: Currently Available
Tool config is based on original PO, please verify tool details at tool inspection
OEM: LAM
Tool Model: Kiyo EX
Software Version (include revision): 1.8.4_SP8-HF5
System Power Rating: 200 AC 3-Phase
Loading Configuration: 4 load ports
Chamber Name 1: PM1
Chamber Name 2: PM2
Chamber Name 3: PM3
Chamber Name 4: PM4
Chamber Name 5: PM5
Chamber 1 Description: Kiyo EX
Chamber 2 Description: Kiyo EX
Chamber 3 Description: Kiyo EX
Chamber 4 Description: Kiyo EX
Chamber 5 Description: Kiyo EX
Chamber 1 Chemicals Gases Used: SiCL4,BCL3,CL2,HBr,CF4,O2,SF6,He,C4F6,CH2F2,Ar,O2,NF3,N2,SO2
Chamber 2 Chemicals Gases Used: SiCL4,BCL3,CL2,HBr,CF4,O2,SF6,He,C4F6,CH2F2,Ar,O2,NF3,N2,SO2
Chamber 3 Chemicals Gases Used: SiCL4,BCL3,CL2,HBr,CF4,O2,SF6,He,C4F6,CH2F2,Ar,O2,NF3,N2,SO2
Chamber 4 Chemicals Gases Used: SiCL4,BCL3,CL2,HBr,CF4,O2,SF6,He,C4F6,CH2F2,Ar,O2,NF3,N2,SO2
Chamber 5 Chemicals Gases Used: SiCL4,BCL3,CL2,HBr,CF4,O2,SF6,He,C4F6,CH2F2,Ar,O2,NF3,N2,SO2
OEM Cable 1: AC RACK
OEM Cable 2: RPDB RACK
OEM Cable 3: RPP
OEM Cable Length 1: 15000
OEM Cable Length 2: 15000
OEM Cable Length 3: 15000
Optional Gas 1: Gas Line 1
Optional Gas 2: Gas Line 2
Optional Gas 3: Gas Line 3
Optional Gas 4: Gas Line 4
Optional Gas 5: Gas Line 5
Optional Gas 6: Gas Line 6
Optional Gas 7: Gas Line 7
Optional Gas 8: Gas Line 8
Optional Gas 9: Gas Line 9
Optional Gas 10: Gas Line 10
Optional Gas 11: Gas Line 11
Optional Gas 12: Gas Line 12
Optional Gas 13: Gas Line 13
Optional Gas 14: Gas Line 14
Optional Gas 15: Gas Line 15
Optional Gas 16: Gas Line 16
Optional Gas 17: Tuning Gas 1
Optional Gas 18: Side He Ballast
Custom Gas Lines 1: SiCL4(125) STEC Z719
Custom Gas Lines 2: BCL3(300) STEC Z719
Custom Gas Lines 3: CL2(300) STEC D219
Custom Gas Lines 4: HBr(500) STEC D219
Custom Gas Lines 5: CF4(300) STEC D219
Custom Gas Lines 6: O2(500) STEC D219
Custom Gas Lines 7: SF6(300) STEC D219
Custom Gas Lines 8: He(500) STEC D219
Custom Gas Lines 9: C4F6(200) STEC D219
Custom Gas Lines 10: CH2F2(150) STEC D219
Custom Gas Lines 11: Ar(600) STEC D219
Custom Gas Lines 12: O2(20) STEC D219
Custom Gas Lines 13: NF3(600) STEC D519
Custom Gas Lines 14: N2(250) STEC D219
Custom Gas Lines 15: SO2(300) STEC D219
Custom Gas Lines 16: Blank
Custom Gas Lines 17: C4F6(200) STEC D219
Custom Gas Lines 18: He(300) STEC D219
Gas TOR 1: SiCL4 125
Gas TOR 2: BCL3 300
Gas TOR 3: CL2 300
Gas TOR 4: HBr 500
Gas TOR 5: CF4 300
Gas TOR 6: O2 500
Gas TOR 7: SF6 300
Gas TOR 8: He 500
Gas TOR 9: C4F6 200
Gas TOR 10: CH2F2 150
Gas TOR 11: Ar 600
Gas TOR 12: O2 20
Gas TOR 13: NF3 600
Gas TOR 14: N2 250
Gas TOR 15: SO2 300
Gas TOR 16: Blank
Gas TOR 17: C4F6 200
Gas TOR 18: He 300
Damage/Missing parts list
Please inspect tool to reconfirm
Dry pumps and customer provided items not included on sales
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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