Macquarie Semiconductor and Technology on behalf of ON Semiconductor (SCI LLC)
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Etch/Ash/Clean - Plasma Processing
Date of Manufacture:
Currently Configured for: 150mm
Current Equipment Status: Available
Location of Equipment: Bucheon, Korea, Republic of
Available date: Currently Available
| Install Type | Standalone | |||
| Original Ship Date from Lam | 2022.08.31 | |||
| Software Type | Lam Envision | |||
| Software Version | E1.5.2 | |||
| Date of Last PM | 2025.03.31 | |||
| Is System On-Line? | No | |||
| Off-Line Date (if applicable) | 2025.04.03 | |||
| CE Mark Certified? | No | |||
| SECS Interface | Yes | |||
| Electrical Requirements | 208v 3-Phase 75A | |||
| OEM Audit Available? | No | |||
| Decontamination Report Exists? | No | |||
| Can Produce Wafers AS IS? | Yes | |||
| Any Known Field Modifications? | No | |||
| All Cables Present? | Yes | |||
| Gas Panel Type | Standard | |||
| 9600SE | Metal Etch | |||
| Key Common Options | Included? | |||
| Signal Lamp Tower | Yes | |||
| Bolt-On-SMIF | No | |||
| Built-In SMIF | No | |||
| Clean Room Manuals | No | |||
| Standard Manuals | No | |||
| Remote Operator Interface | No | |||
| Key Cluster Mainframe Items | ||||
| Equipe Autoloader | Yes | |||
| Built-In Hepa Filter | No | |||
| Orbitally Welded Gas Box | Yes | |||
| Backside Helium Cooling | Yes | |||
| Helium Cooling MFC Type | UPC | |||
| Heated Pumping Manifolds | Yes | |||
| On-Board RF Generators | Yes | |||
| Remote RF Cart | No | |||
| Remote Gas Box | No | |||
| Main On-Board AC Distribution Type | Circuit Breaker | |||
| Remote AC Box | No | |||
| DSQ | Yes | |||
| DSQ Strip Type | Hinged | |||
| Hine 38A Indexers | Yes | |||
| Endpoint Detection System | Yes | |||
| Endpoint Type | Photodiode | |||
| Endpoint Lam Part Number | 853-001983-005 | |||
| Photodiode Wavelength(s) | A,B CH 740nm | |||
| Chamber Liner Present | Yes | |||
| Chamber Anodization Condition | Normal | |||
| Electrode Gap | Fixed Gap | |||
| Wafer Clamp | ESC | |||
| ESC Type | Unipolar | |||
| Gate Valve Mfg, Model/Type | ASSY,GATE DRIVE,ALLI 6 /LAM | |||
| TCP Coil Size | 6” | |||
| Turbo Pump Details | ||||
| Chamber Position | Turbo Mfgr. | Turbo Model | ||
| Main Chamber | Alcatel | ATH1300M | ||
| PM 2 / Main Chamber | N/A | N/A | ||
| PM 3 / Main Chamber | N/A | N/A | ||
| PM 4 / MW | N/A | N/A | ||
| RF/Microwave Generator Details | ||||
| Chamber Position | Mfgr. | Model | ||
| Main Chamber (T) | AE | RFG1250 | ||
| Main Chamber (B) | AE | RFDS | ||
| DSQ | AE | RFG1250 | ||
| MAIN Chamber | ||||
| Gas | Gas | Flow | MFC | MFC Model |
| Line # | (sccm) | Mfgr. | ||
| 1 | AR | 100 | Area(Used) | FC-2900V |
| 2 | SF6 | 200 | Area(Used) | FC-2900V |
| 3 | N2 | 50 | Area(Used) | FC-2900V |
| 4 | O2 | 500 | Area(Used) | FC-2900V |
| 5 | CL2 | 200 | Area(Used) | FC-2900KZ |
| 6 | BCL3 | 200 | Area(Used) | FC-2900KZ |
| DSQ | ||||
| Gas Line # | Gas | Flow (sccm) | MFC Mfgr. | MFC Model |
| 1 | O2 | 2000 | Area(Used) | FC-2900V |
| 3 | H2O | 500 | Area(Used) | FC-2900V |
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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