Macquarie Semiconductor and Technology on behalf of ON Semiconductor (SCI LLC)

Canon FPA-5500 iZa

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Asset ID: 229001

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Canon

FPA-5500 iZa

i-Line Wide-Field Stepper

Lithography Equipment

Equipment details:

Date of Manufacture: 2006-08-01

Currently Configured for: 200mm

Current Equipment Status: Available

Location of Equipment: Nampa, United States

Available date: Currently Available


Description:

Date of Audit7/25/2025
Fab Equipment IDCIZA1D0100
Original Manufacture Date2006-08
System Controller MakeHitachi
System Operating SystemRedHat
Software versionV72.05a
Wafer Size (inch)8
Wafer TypeNotch
Track/Wafer Interfacen/a
Track Typen/a
Track Modeln/a
Wafer Interfacen/a
Auto Feeder Type IVRight
Installation TypeStand-Alone
Wafer Chuck Typestandard
Wafer Chuck MaterialSilicon Carbide
Reticle Size6"
Reticle Cassette TypeCanon
Reticle ChangerCanon
Additional Reticle LibraryCanon
Power Receiving BoxInternal
Outlet Power BoxYES 
Service ToolNO
Chuck Maintenance UnitYES 
Optional Parts (RPC/EBR)NO
Lamp ManufacturerUSHIO
COCOM StickerEnglish
SECS/GEM CapableYES
E-Connectivity/DiagnosticNO
Date of Last PM5/7/2023
Adjustment/Check Available?YES
ATP  Available?YES
System lifetime wafer count?
Lamp Age (hours)?
System StatusOff-Line
Can Produce Wafers as-is?YES
Off-Line Date (if applicable)8/17/2023
OEM Audit Available?NO
3rd Party Audit Available?NO
Decontamination Report?NO
All cabling present?YES
Operation Manual English
Inspection SheetEnglish
Service ManualEnglish
Any Field Modifications?NO
Pellicle Particle Checker6"
Reticle Barcode ReaderCanon
Cassette Barcode Reader6"
SAC UnitNO
EMO Guard RingYES
Temperature RecorderNO
3 Phase TransformerNO
# of Signal Tower Colors3


Product images

The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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