Macquarie Semiconductor and Technology on behalf of ON Semiconductor (SCI LLC)

AMAT / Varian Semiconductor Equipment Associates (VSEA) Viista HE XP

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Asset ID: 228422

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AMAT / Varian Semiconductor Equipment Associates (VSEA)

Viista HE XP

High Energy Implanter

Ion Implanters

Equipment details:

Date of Manufacture: 2024-11-01

Currently Configured for: 150mm

Current Equipment Status: Available

Location of Equipment: Bucheon, Korea, Republic of

Available date: Currently Available

Is System On-Line?Yes 
Can Produce Wafers As-Is ?No
CE Mark Certified ?Yes
Are any Manuals included ?No
OEM Audit Available?Yes 
3rd Party Audit Available ?Yes 
Decontamination Report Exists? No
Overall Tool ConditionSelect
Any Field Modifications ?No
All Cables present ?Yes
Any Corrosion visible on modules ?No
Any Missing / Damaged Parts ? No
Shipping Brackets Included ?Yes
Wafer HandlerYes 
Handler Type 
# of Cassette / FOUP LoadersFOUP Loaders
End-Effecter Type150mm single
Pre-Aligner ?No
Mini-EnvironmentYes
Handler Options ?Hot Chuck
System Software 
System SW (OS) versionWindows 7
System SW (App) versionVIIStaHE 09 71 41
Log-In User NameTech
Log-In PasswordTechTech
SEMI Std Options (E84, E99, etc..)E84
HSMSYes
Supporting Equipment 
Ext TransformerNo
UPSNo
Heat Exchanger / ChillerChiller
Facility Requirements 
CDAYes
DIWYes
VacuumNo
GasGN2,PN2
Power 208V 3phase 5Wire


Product images

The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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