Macquarie Semiconductor and Technology on behalf of ON Semiconductor (SCI LLC)
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AMAT / Varian Semiconductor Equipment Associates (VSEA)
Date of Manufacture: 2024-11-01
Currently Configured for: 150mm
Current Equipment Status: Available
Location of Equipment: Bucheon, Korea, Republic of
Available date: Currently Available
Is System On-Line? | Yes |
Can Produce Wafers As-Is ? | No |
CE Mark Certified ? | Yes |
Are any Manuals included ? | No |
OEM Audit Available? | Yes |
3rd Party Audit Available ? | Yes |
Decontamination Report Exists? | No |
Overall Tool Condition | Select |
Any Field Modifications ? | No |
All Cables present ? | Yes |
Any Corrosion visible on modules ? | No |
Any Missing / Damaged Parts ? | No |
Shipping Brackets Included ? | Yes |
Wafer Handler | Yes |
Handler Type | |
# of Cassette / FOUP Loaders | FOUP Loaders |
End-Effecter Type | 150mm single |
Pre-Aligner ? | No |
Mini-Environment | Yes |
Handler Options ? | Hot Chuck |
System Software | |
System SW (OS) version | Windows 7 |
System SW (App) version | VIIStaHE 09 71 41 |
Log-In User Name | Tech |
Log-In Password | TechTech |
SEMI Std Options (E84, E99, etc..) | E84 |
HSMS | Yes |
Supporting Equipment | |
Ext Transformer | No |
UPS | No |
Heat Exchanger / Chiller | Chiller |
Facility Requirements | |
CDA | Yes |
DIW | Yes |
Vacuum | No |
Gas | GN2,PN2 |
Power | 208V 3phase 5Wire |
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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