Macquarie Semiconductor and Technology on behalf of ON Semiconductor Czech Republic s.r.o.
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Axcelis Technologies Inc. / Eaton
Date of Manufacture: 2001-07-04
Currently Configured for: 150mm
Current Equipment Status: Available
Location of Equipment: Czech Republic
Available date: Currently Available
| Date of Audit | 5-Aug-25 | |
| Serial Number | 80522 | |
| Wafer Size (inches) | 6 | |
| Loading Configuration | Open Cassette | |
| Original Ship Date from OEM | Jul-01 | |
| Software Version | 6.12.3 | |
| Sun SPARCStation Version | NA | |
| Automated Beam tuning and Set-Up w/Eaton Autotune | Yes | |
| Is System On-Line? | No | |
| Off-Line Date (if applicable) | Never in production | |
| CE Mark Certified? | No | |
| OEM Audit Available? | Yes | |
| Can Produce Wafers AS IS? | No | |
| Any Known Field Modifications? | No | |
| All Cables Present? | YES | |
| GEM/SECS Interface | Yes | |
| SECS II Interface | No | |
| System Configuration | Model Type | |
| High Current | GSD-200EE | |
| Beamline Version | STANDARD | |
| Block Upgrade | ||
| Energy Range | 90KeV | |
| Key Common Options | Included? | |
| Clean Room Manuals | No | |
| Standard Manuals | Yes | |
| Fab Starter Kit | No | |
| Fast Maintenance Kit | No | |
| Wafer Handling | ||
| Wafer top-side Bar code reading system capability | No | |
| 4-Cassette Capability | Yes | |
| Automatic Flat or Notch Alignment Capability w/buffer cassette | YES | |
| Slot-to-Slot Wafer Integrity (200mm only) | No | |
| Direct Rotory Drive | YES | |
| Two Axis Variable Implant Angle (+/- 11 Degrees in two axis) (Quad Implant Capability) | No | |
| NV-GSD 200 Series Process Disk w/Active Cooling & Chiller | Yes | |
| Real-Time Dose Control | No | |
| Real-Time Beam Profiler | No | |
| Electron Shower w/Gas Bleed and Closed Loop Control | NO | |
| Machine Configuration | ||
| UPS | No | |
| Enhanced Low Energy Beamline | YES | |
| Single Stage Extraction | 90keV | |
| Triple Indexed Mass Analysis Magnet & Power Supply | No | |
| Ion Source Type | ELS | |
| Source Material Type | Moly | |
| Vaporizer | NONE | |
| Variable Aperture Extraction Electrode | No | |
| Flag Faraday Injector | Yes | |
| Three Position Resolving Aperture (90keV only) | No | |
| In-Situ Wafer Charge Monitor | No | |
| In-Situ Particle Detector HYT | No | |
| Signal Tower | Yes | |
| Lead Floor | No | |
| Beamline and Source Pumps | ||
| Source Turbo Pump (P1) | STP H2000C | |
| Beam Line Cryo Pump (P3) | CTI ONBOARD 10 | |
| End Station Cryo Pump (P2) | CTI ONBOARD 8 | |
| Gas Type | MFC Type and Model | |
| Ar | UNIT 1662 10SCCM | SDS |
| BF3 | UNIT 1662 10SCCM | SDS |
| AsH3 | UNIT 1662 10SCCM | SDS |
| PH3 | UNIT 1660 10SCCM | SDS |
| External Facilities Connections | Ar | N2 | None | |
| Support Equipment | ||
| Key Common Options | ||
| Cyro Compressors | Yes | |
| Manufacturer/Model | CTI 9600 | |
| Quantity | 1 | |
| Vacuum Pumps | No | |
| Remote Disk Chiller | Yes | |
| Mfg and Model | SMC-HRS050-WF-20 |
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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