Macquarie Semiconductor and Technology on behalf of ON Semiconductor Czech Republic s.r.o.
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Axcelis Technologies Inc. / Eaton
Date of Manufacture: 1993-08-01
Currently Configured for: 150mm
Current Equipment Status: Available
Location of Equipment: Czech Republic
Available date: Currently Available
Date of Audit 5-Aug-25
Wafer Size (inches) 6
Loading Configuration Open
Cassette Original
Ship Date from OEM 1993
Software Version 6.12.4
Sun SPARCStation Version NA
Automated Beam tuning and Set-Up w/Eaton Autotune Yes
Date of Last PM 2022
Is System On-Line? No
Off-Line Date (if applicable) 2022
CE Mark Certified? No
OEM Audit Available? Yes
Can Produce Wafers AS IS? No
Any Known Field Modifications? No
All Cables Present?YES
GEM/SECS Interface Yes
SECS II Interface No
System Configuration
Model Type
High Current
GSD-100
Energy Range 160KeV
Key
Common Options Included?
Clean Room Manuals No
Standard Manuals Yes
Fab Starter Kit No
Fast Maintenance Kit No
Wafer Handling
Wafer top-side Bar code reading system capability No
4-Cassette Capability Yes
Automatic Flat or Notch Alignment Capability w/buffer cassette No
Slot-to-Slot
Wafer Integrity (200mm only) No
Direct Rotory Drive YES
Two Axis Variable Implant Angle (+/- 11 Degrees in two axis) (Quad Implant Capability) No
NV-GSD 200 Series Process Disk w/Active Cooling & Chiller Yes
Real-Time
Dose Control No
Real-Time
Beam Profiler No
Electron Shower w/Gas Bleed and Closed Loop Control Yes
Machine Configuration
UPS No
Enhanced Low Energy Beamline No
Single Stage Extraction 80keV
Triple Indexed Mass Analysis Magnet & Power Supply No
Post Accel Electrode Assembly
80keV-160kV only
Ion Source Type
ELS
Source
Material Type Moly
Vaporizer Dual
Variable Aperture Extraction Electrode No
Flag Faraday Injector Yes
Three Position Resolving Aperture (90keV only) No
In-Situ Wafer Charge Monitor No
In-Situ Particle Detector HYT No
Signal Tower Yes
Lead Floor No
Source Turbo Pump (P1)
STP H2000C
Beam Line Cryo Pump (P3)
CTI ONBOARD 10
End Station Cryo Pump (P2)
CTI ONBOARD 8
Gas Type
MFC Type and Model
Ar
MKS-1640A 5SCCM
BF3
UFC-150A 5SCCM
SDS
AsH3
MKS-1640A 5SCCM
SDS
PH3
MKS-1640A 5SCCM
SDS
External Facilities Connections
Ar
| N2 | None
Key
Common Options
Cyro Compressors Yes
Manufacturer/Model CTI 9600
Quantity 1
Vacuum Pumps No
Pump Type Wet / Dry
Manufacturer/Model
Quantity
Remote
Disk Chiller Yes
Mfg and Model
SMC-HRS050-VUF-20
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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