Macquarie Semiconductor and Technology on behalf of Intel Resale Corporation
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Film Thickness Measurement System
Date of Manufacture:
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Portland, United States
Available date: Currently Available
· CD (1D and 2D features) and Film Stack measurement
· Prealigner and full alignment using Vision Processing
· External Server SuperGrendel for fast computation (168 cores)
· 25 wafer load ports (Asyst) with robot transfer (2 paddles)
· Integrated Mini-Environment
· Measurement chamber with separated optical table design
· Pneumatic floating system ensuring no vibration for both stage and optics tables
· Two User Interface (Front and Rear)
· CE marking compliance
· SECS/GEM Full Capability
· Software: UNT 6.0
· Autofocus
· Facilities Requirements: Power Supply (check RP) Compressed Air
N2
Vacuum Exhaust Pedestal
· Additional Information available upon request
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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