Macquarie Semiconductor and Technology on behalf of ON Semiconductor (SCI LLC)
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Date of Manufacture: 2010-07-01
Currently Configured for: 300mm
Current Equipment Status: Available
Location of Equipment: Hopewell Junction, United States
Available date: Currently Available
| Centura ACP | |||
| Chamber A,B, C, D | EPI | ||
| Software Version | ccB4.3_331 | ||
| Clean Room Manuals | No | ||
| Standard Manuals | No | ||
| OEM Audit Available? | No | ||
| Can Produce Wafers AS IS? | Yes | ||
| Any Known Field Modifications? | Yes | ||
| All Cables Present? | Yes | ||
| 3 loadports | |||
| System Type | ATM | ||
| Loadlock Type | AP SWLL | ||
| Transfer Chamber Robot: STD REACH | Single Blade | ||
| Gas Line # | Gas | Flow (sccm) | MFC Mfgr. |
| 1 | N2/H2 | 170000 | Horiba |
| 2 | N2/H2 | 50000 | |
| 3 | TCS | 33000 | |
| 4 | HCl | 5000 | |
| 5 | HCl | 30000 | |
| 26 | N2/H2 | N/A | |
| 12 | PH3 | 305 | |
| 13 | PH3 | 100 | |
| 15 | PH3 | 35 | |
| 6 | PH3 | 10 | |
| 25 | DEP Purge | ||
| 27 | purge | 1 | |
| 28 | AUX Purge | ||
| 31 | PH3 | ||
| 32 | N2/H2 | ||
| 33 | PH3 | ||
| 34 | N2/H2 | ||
| Atmospheric Robot Type | YASKAWA |
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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