Macquarie Semiconductor and Technology on behalf of Intel Resale Corporation
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Lam Research / Novellus Systems Inc.
ECD (Electro Chemical Deposition)
Date of Manufacture: 2022-01-01
Currently Configured for: 300mm
Current Equipment Status: Incoming
Asset HDD not included
Location of Equipment: Chandler, United States
Available date: Currently Available
Lam Research / Novellus Systems Inc. SABRE Extreme
(aka SABRE I12 ELECTROPLATER, 300mm, i12 Frame)
Tool never used and HDD may possibly be included, subject to seller's approval
Packing list unavailable
Tool is crated in warehouse with no photos available including S/N tag photo
Module | Details |
Fixloader | N2 Loadport |
Control PC’s | 2 proteus PC’s, Chase & main |
FFU | SABRE FFU and SABRE ANL FFU - Pentagon |
Front End Robot | Vortex |
Back End Robot | Vortex |
Anneal Chambers | 5 chambers Gas Box Hot Plate Cold Plate Carrier arm (Fork carrier) |
Aligner Station | Optical Aligner- Vortex |
Transfer Station | Transfer Station |
Plating Cell | Sabre Extreme plating cell |
Anode chamber | High-Acid anode chamber Charge plate |
Membrane | High-Acid membrane |
HRVA | Domed HRVA (non cu); HRVA (cu) |
Insert | Insert is in cell, mounted above HRVA |
Clamshell | Modular clamshell drive |
Cone | Cone |
Cylinder | Dry cylinder |
Cup | Cup assembly (1.5mm) |
Lift Controller | IAI Lift controller |
AAE | AAE assy’s - Cel1, Cell 2/3 Robot Motor Controller Bearings |
PEM | Front side treatment: O-ring style PEM chuck EBR arm nozzle PEM controllers PEM motor spindles |
Dosing system | Dosing system hardware and controls; Dosing control Dosing system PNL NOWPAK Dosing system kit |
CDM Module | CDM module, Syringe controllers. Flow switches & Valves; Chem Dilution Mod Assy CDM module plumbing kit CDM sensor kit |
Bath Module | PS Reservoir Assy Ultrasonic Level Sensor PVDF Heat Exchanger/ Dual PVDF Heat Exchangers for newer tools or upgrades |
Plating Pumps | Plating pump Flow meters - Vortex |
Invertor (50Hz) | Frequency invertor used where applicable |
Aspirator Pump | Selectable Drain Aspirator |
Heater/ Chiller | TF10000 |
ESIOCs | ESIOC’s; Wafer Handler Bath Plating Post-plating Anneal SAC |
EC2 Controllers | 1x System controller 2x Module controllers |
E -Net | 2 E-net hubs and cabling setup |
PDA | Plating distribution assembly |
AE PPS | Dual channel power supply: E-Wave II |
Additional high configuration details, below are included:
i12 configuration
Extreme cells
Lifts (X-SEL) and tilts (ROBO Cyl)
IPA spin controllers
PEM's are the same as EPN except for the deflector shields are for Non-Cu style
CDM tanks but not used, due to the PRIZE (FST) configuration
PSD4 syringe pumps
Extreme plating cells
Vortex wet and dry robot
AE E-WAVE PS
EC2 controllers
Anneals, but not used for Non-Cu
DI/filter compartment is similar to the FX, but w/out SAC O2
Facilities panel is similar to the FX
DI booster pump
AC 10 cell pump controllers similar to EPN
Levitronix SAC pump similar to FX
Anneal shroud similar to FX
Front end (mini environment) folding side door access to anneals and FE robot, similar to FX
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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