Macquarie Semiconductor and Technology on behalf of Micron Memory Taiwan Co., Ltd. (F16)
The images and data contained herein is owned by Macquarie and is intended for use only by potential purchasers of goods shown herein. Except for such permitted usage, no other use of the images and data is permitted and such images and data shall not be exhibited or shown in any websites or social media or for any commercial purposes without Macquarie’s written permission. Therefore, no seller of goods like the goods shown herein has any right or authority to show or exhibit any images or data shown herein.
ECD (Electro Chemical Deposition)
Date of Manufacture:
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Taichung City, Taiwan
Available date: Currently Available
AMAT MUSTC
Tool config is based on original PO, please verify tool details at tool inspection
OEM: AMAT
Tool Model: MUSANG
Retrofit Part Type 1: Metro 2.0
Chamber Name 1: P1L1
Chamber Name 2: P2L1
Chamber Name 3: P1R1
Chamber Name 4: P2R1
Chamber Name 5: S1L1
Chamber Name 6: S1L2
Chamber Name 7: S1R1
Chamber Name 8: S1R2
Chamber Name 9: M1L1
Chamber Name 10: M1L2
Chamber Name 11: M1R1
Chamber Name 12: M12
Chamber 1 Description: plating
Chamber 2 Description: plating
Chamber 3 Description: plating
Chamber 4 Description: plating
Chamber 5 Description: Velocity
Chamber 6 Description: Velocity
Chamber 7 Description: Velocity
Chamber 8 Description: Velocity
Chamber 9 Description: safe seal dock wafer
Chamber 10 Description: safe seal dock wafer
Chamber 11 Description: safe seal dock wafer
Chamber 12 Description: safe seal dock wafer
Chamber 1 Chemicals Gases Used: H2SO4Cu/H2SO4
Chamber 2 Chemicals Gases Used: H2SO4Cu/H2SO4
Chamber 3 Chemicals Gases Used: H2SO4Cu/H2SO4
Chamber 4 Chemicals Gases Used: H2SO4Cu/H2SO4
Chamber 5 Chemicals Gases Used: N2 / DSPM
Chamber 6 Chemicals Gases Used: N2 / DSPM
Chamber 7 Chemicals Gases Used: N2 / DSPM
Chamber 8 Chemicals Gases Used: N2 / DSPM
Chamber 9 Chemicals Gases Used: N2
Chamber 10 Chemicals Gases Used: N2
Chamber 11 Chemicals Gases Used: N2
Chamber 12 Chemicals Gases Used: N2
N2 Load Port Exists 1: Yes
N2 Load port Vendor 1: OEM
N2 Load Port Exists 2: Yes
N2 Load port Vendor 2: OEM
N2 Load Port Exists 3: Yes
N2 Load port Vendor 3: OEM
Damage/Missing parts list
Please inspect tool to reconfirm
Dry pumps and customer provided items not included on sales
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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