Macquarie Semiconductor and Technology on behalf of Micron Memory Japan, K.K. (F15)

Novellus Systems Inc. SABRE 3D

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Asset ID: 16300

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Novellus Systems Inc.

SABRE 3D

ECD (Electro Chemical Deposition)

Deposition Equipment

Equipment details:

Date of Manufacture: 2015-01-05

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Hiroshima, Japan

Available date: 1/23/2026

Tool Status:  In production.

Configuration.  Audit to verify.

SABRE 3D Single Module
 
PVC-4910 (SABRE 3D Single Module) Qty. 1
 
KB + Athena Remote Qty. 1
 
Additional (Third) FOUP - 300mm qty. 1
 
RFID Reader 3FOUP qty. 1
 
OHV CA Head-On Transmission qty. 1
 
LT Front & Rear 4 Color Qty. 1
 
Aligner qty. 1
 
2 APT Duets (4910) qty. 1
 
Chemical ADM (TSV Only) qty. 1
 
EBR 4910, 2 Duets Qty. 1
 
TSV Copper Qty. 1
 
8x0 Config 1 Ba qty. 1
 
TF10000 w/Heater qty. 1
 
300mm, 1.00 EE, 0.40mm Cont Qty. 4
 
Copper TSV Process Package Qty. 4
 
Degasser Qty. 4
 
SABRE 3D Single, 2 APT, 2 EBR/SRD Qty. 1
 
Cell Specific Flowmeters Qty. 4
 
NSR 17, NSR 1087310 Pneumatic Flow Switch qty. 1
 
NSR 18, Tool Ladder 71-299012-00 qty. 1
 
 
9.5A, 750W Serial Qty. 4
 
NSR 1, 845-154096-001 Trough Vent, Ver C  Qty. 1
 
NSR 2, 845-211454-001,KIT,SBR-3D,BATH R Qty. 1
 
NSR 3, SW CESPTC53073A, PLATE,LEVELING F Qty. 1
 
NSR 4, Blue900109 BE Robot 8 Cell Qty. 1
 
NSR 5,CESPTC52432A Factory Int Ionizer Qty. 1
 
NSR 6, 845-175917-001 8c Video Monitor Qty. 1
 
NSR 7, SW 856-155785-001 Kit Upgrd, TR 4 Qty. 4
 
NSR 8, 845-192680-001 KIT,SBR-3D,1087310 Qty. 1
 
NSR 9, Blue900137, Aligner, Vortex,300mm Qty. 1
 
NSR10, SW, 02-414924-02, ASSY,DRIP PAN,P Qty. 1
 
NSR 11, SW, 02-443139-02, ASSY,DRIP PAN, Qty. 1
 
NSR 12, SW, 27-403019-00, PUMP,DI WATER, Qty. 1
 
NSR 13, SW, 857-170700-101, KIT,CNTCTR R Qty. 1
 
NSR 14, SW, 857-170700-102, KIT,CNTCTR R Qty. 1
 
NSR 15, SW, 856-200391-001, KIT,UPGRD,AI Qty. 1
 
NSR 16, SW, 856-200391-002, KIT,UPGRD,AI Qty. 1
 

Product images

The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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