Macquarie Semiconductor and Technology on behalf of Confidential Seller
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Etch/Ash/Clean - Plasma Processing
Date of Manufacture: 2013-01-01
Currently Configured for: 150mm
Current Equipment Status: Incoming
Location of Equipment: Durham, United States
Available date: TBD
NOTES:
1) Refurbished tool purchased from Versatek, Inc.
2) Center finder board retrofitted for transparent and opaque substrates.
3) All chambers have the same MFC configuration. Verify all MFC sizes.
PUNCH LIST:
1) Verify light tower.
2) Verify heat exchangers (how many and brand)
Wafer Size (inches) 6
Install Type Through-the-wall
Original Ship Date from AMAT 2013
NOTE 1
Software Version E5.01C
Date of Last PM 25-Sep
Is System On-Line? Yes
CE Mark Certified? Yes
OEM Audit Available? No
Decontamination Report Exists? No
Can Produce Wafers AS IS? Yes
Any Known Field Modifications?
NOTE 2
All Cables Present? Yes
P5000 Mark II
xxxx
System Configuration
Chamber Type
Position A
MxP
Position B
MxP
Position C
MxP
Position D
MxP
Front of System
Ch F (C)
Ch E (C)
Ch D
Ch C
Ch B
Ch A
Gas
Panel
Directory of Etch Chamber Types for
Box 3
Process
Mark 1, Mark 2, MxP, or R2
Metal Etch
DPS R0, DPS R1, or DPS Plus
Metal Etch
Mark 1, Mark 2, MxP, or MxP+, eMxP+
Dielectric Etch
Super e, eMAX, or IPS
Dielectric Etch
RPS
Dielectric Etch
Mark 1, Mark 2, MxP, or MxP+
Silicon Etch
DPS Poly, DPS Deep Trench, or DPS
Plus
Silicon Etch
PRSP / ASP / ASP+
Ash/Strip
Cooldown / Fast Cooldown
Cooldown
Wafer Orienter
Orienter
Key Common Options
Included?
Electrostatic Chuck Quartz Ring
Independent Backside He Cool Yes
VDS (Vapor Delivery System) No
Signal Lamp Tower Yes
Bolt-On-SMIF No
Clean Room Manuals No
Standard Manuals Yes
Remote Service Monitors Yes
Key P5000 Mainframe Items
Phase 3 Robot Yes
Phase 3 Cassette Handler Yes
Bolt-Down Lid Yes
Storage Elevator 15 Slots
Expanded (20 Slot) VME Yes
Floppy Drive Type 3 ½”
Mini-Controller Yes
Gas Panel Type 28 line
CES Gas Panel Yes
MxP Chamber Items
RF Match Type Phase IV
Slit Liner Door No
Lid Type Boltdown
Autobias yes
Endpoint Standard
Chamber Liner No
Cathode Type Standard
Lid Gas Distribution GDP
Remote Frame Status
Included?
Stand Alone Endpoint System No
RF Generator Rack Yes
Remote Frame w/AC Box Yes
Chamber Position
Turbo Mfgr.
Position A
Varian
Position B
Varian
Position C
Varian
Position D
Varian
Etch Chamber Pump
Manufacturer Edwards
Model iH600
Quantity Required 4
Included With System No
Load Lock Pump
Manufacturer Edwards
Model 80
Included With System Yes
Model HX150
Quantity Required 1
Included With System Yes
AMAT Heat Exchanger
Model AMAT 0
Quantity Required 1
Included With System Yes
Gas Line # /
Gas / Flow (sccm)
/ MFC Mfgr. /
MFC Model
1
/ Argon /
200 / Brooks
/ 5850/5964
2
/ O2 /
500 / Brooks
/ ditto
3
/ CHF3 / 200 /
Brooks / ditto
4
/ NF3 HI /
250 / Brooks
/ ditto
5
/ NF3 LO /
50 / Brooks
/ ditto
6
/ $N2O HI /
750 / Brooks
/ ditto
7
/ N2O LO /
50 / Brooks
/ ditto
9
/ NOTE 3
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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