Macquarie Semiconductor and Technology on behalf of Confidential Seller
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P-5000 Mark II MxP+ Dielectric
Etch/Ash/Clean - Plasma Processing
Date of Manufacture: 2009-10-01
Currently Configured for: 150mm
Current Equipment Status: Incoming
Location of Equipment: Durham, United States
Available date: TBD
NOTES: | ||
1) System initially configured for 100mm. Converted to 150mm in 2012. | ||
2) Refurbished tool purchased from OEM Group, Inc. | ||
3) Center finder board retrofitted for transparent and opaque substrates. | ||
4) All chambers have the same MFC configuration. | ||
Wafer Size (inches) | 6 NOTE 1 | |
Install Type | Through-the-wall | |
Original Ship Date from AMAT | 10/2009 NOTE 2 | |
Software Version | 5.01C | |
Date of Last PM | 9/25/2025 | |
Is System On-Line? | Yes | |
CE Mark Certified? | Yes | |
OEM Audit Available? | No | |
Decontamination Report Exists? | No | |
Can Produce Wafers AS IS? | Yes | |
Any Known Field Modifications? | NOTE 3 | |
All Cables Present? | Yes | |
System Configuration | Chamber Type | |
Position A | MxP | |
Position B | MxP | |
Position C | MxP | |
Position D | Orienter | |
Front of | System | |
Ch F (C) | Ch E (C) | |
Ch D | Ch C | |
Ch B | Ch A | |
Gas | Panel | |
Mark 1, Mark 2, MxP, or R2 | Metal Etch | |
DPS R0, DPS R1, or DPS Plus | Metal Etch | |
Mark 1, Mark 2, MxP, or MxP+, eMxP+ | Dielectric Etch | |
Super e, eMAX, or IPS | Dielectric Etch | |
RPS | Dielectric Etch | |
Mark 1, Mark 2, MxP, or MxP+ | Silicon Etch | |
DPS Poly, DPS Deep Trench, or DPS Plus | Silicon Etch | |
PRSP / ASP / ASP+ | Ash/Strip | |
Cooldown / Fast Cooldown | Cooldown | |
Wafer Orienter | Orienter | |
Electrostatic Chuck | Yes | |
Independent Backside He Cool | Yes | |
VDS (Vapor Delivery System) | No | |
Signal Lamp Tower | Yes | |
Bolt-On-SMIF | No | |
Clean Room Manuals | No | |
Standard Manuals | Yes | |
Remote Service Monitors | Yes | |
Phase 3 Robot | Yes | |
Phase 3 Cassette Handler | Yes | |
Bolt-Down Lid | Yes | |
Storage Elevator | 29 Slots | |
Expanded (20 Slot) VME | Yes | |
Floppy Drive Type | 3 ½” | |
Mini-Controller | Yes | |
Gas Panel Type | 28 line | |
CES Gas Panel | Yes | |
RF Match Type | Phase IV | |
Slit Liner Door | No | |
Lid Type | Boltdown | |
Autobias | yes | |
Endpoint | Standard | |
Chamber Liner | No | |
Cathode Type | Standard | |
Lid Gas Distribution | GDP | |
Stand Alone Endpoint System | No | |
RF Generator Rack | Yes | |
Remote Frame w/AC Box | Yes | |
Chamber Position | Turbo Mfgr. | Turbo Model |
Position A | Varian | V300 |
Position B | Varian | V300 |
Position C | Varian | V300 |
Manufacturer | Edwards | |
Model | iH600 | |
Quantity Required | 3 | |
Included With System | No | |
Manufacturer | Edwards | |
Model | 80 | |
Included With System | Yes | |
Model | Affinity | |
Quantity Required | 1 | |
Model | AMAT 0 | |
Quantity Required | 1 | |
Included With System | Yes | |
Gas Line # / Gas / Flow (sccm) / MFC Mfgr. / MFC Model | ||
1 / Argon / 200 / Brooks / 5850/5964 | ||
2 / O2 / 100 / Brooks / ditto | ||
3 / CHF3 / 200 / Brooks / ditto | ||
4 / NF3 HI / 250 / Brooks / ditto | ||
5 / SF6 / 100 / Brooks / ditto | ||
6 / CF4 / 200 / Brooks / ditto | ||
7 / N2O LO / 50 / Brooks / ditto | ||
8 | ||
9 / NOTE 4 |
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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