LAM Research Rainbow 4520i

Equipment details:

Date of Manufacture:

Currently Configured for: 150mm

Current Equipment Status: Available

Location of Equipment: Czech Republic

Available date: Currently Available

Description:

Install Type     Through-the-wall                                        

Software Type               Lam Envision                                

Software Version        E 1.5.2                               

Is System On-Line?   No                                        

CE Mark Certified?    No                                        

SECS Interface             Yes                                      

Electrical Requirements        208V/30A/50Hz                                           

OEM Audit Available?              No                                        

Decontamination Report Exists?     No                                        

Can Produce Wafers AS IS? Yes                                      

Any Known Field Modifications?      No                                        

All Cables Present?   Yes                                      

Gas Panel Type            Standard                                         

RAINBOW                                                        

PM 1 / Main Chamber              Oxide Etch                                      

Key Common Options            Included?                                        

Electrostatic Chuck  No                                       

Turbo Pump On Process Ch(s)          No                                        

Signal Lamp Tower     No                                        

Bolt-On-SMIF No                                        

Built-In SMIF  No                                        

Loadport Make/Model 38A Elevator                                               

Endpoint Detection System Yes                                      

Endpoint Type Monochromators                                     

Endpoint (1) Lam Part # Ep200Mmd                                              

Clean Room Manuals No                                      

Standard Manuals No                                             

Isotropic Etch Module Yes                                   

Autoloader No                                              

Built-In Hepa Filter No                                            

Orbitally Welded Gas Box Yes                                            

Backside Helium Cooling Yes                                           

Helium Cooling MFC Type    UNIT UPC1300                                            

Heated Pumping Manifolds Yes                                      

On-Board RF Generators       No                                        

Remote RF Cart           Yes                                      

RF Cart Lam Part #    LAM                                     

RF Match Type and Model (if not Lam) AE RF Navio                                             

Remote Gas Box         No        

Remote Operator Interface  Yes                                      

Main On-Board AC Distribution

Type     Circuit Breaker                                             

Remote AC Box           No                                        

Pump Controller         No                                        

Hine 38A Indexers      No                                        

Atmospheric Passivation Module    No                                        

Plasma Load Lock (PLL)        No                                        

High Conductance Manifold              No                                        

PM 1 / Main Chamber              Advanced Energy        PDW2200                        

PM 2 / Isotropic Ch. / PLL      ENI       OEM 12 A                         

Key Common Options            Included?                                        

Electrostatic Chuck  No                                       

Turbo Pump On Process Ch(s)          No                                        

Signal Lamp Tower     No                                        

Bolt-On-SMIF No                                        

Built-In SMIF  No                                        

Loadport Make/Model             38A Elevator                                   

Endpoint Detection System Yes                                      

Endpoint Type               Monochromators                                       

Endpoint (1) Lam Part #          Ep200Mmd                                    

Clean Room Manuals             No                                        

Standard Manuals     No                                        

Key Rainbow Mainframe Items                                                        

Isotropic Etch Module             Yes                                      

Autoloader      No                                        

Built-In Hepa Filter    No                                        

Orbitally Welded Gas Box     Yes                                       

Backside Helium Cooling     Yes                                      

Helium Cooling MFC Type    UNIT UPC1300                                            

Heated Pumping Manifolds Yes                                      

On-Board RF Generators       No                                        

Remote RF Cart           Yes                                      

RF Cart Lam Part #    LAM                                     

RF Cart Machine Time                                                           

RF Match Type and Model (if not Lam)         AE RF Navio                                    

Remote Gas Box         No        

Remote Operator Interface  Yes                       

Main On-Board AC Distribution

Type     Circuit Breaker                                             

Chiller Information                                                  

Manufacturer Edwards                                           

Model TCU2080                                         

# of Cooling Channels Two                                  

Quantity Required     1            

Included With System             Yes