Macquarie Semiconductor and Technology on behalf of ON Semiconductor (SCI LLC)
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Etch/Ash/Clean - Plasma Processing
Date of Manufacture:
Currently Configured for: 150mm
Current Equipment Status: Available
Location of Equipment: Bucheon, Korea, Republic of
Available date: Currently Available
| Install Type | Stand Alone | |||
| Original Ship Date from Lam | Used(2022.05.26) | |||
| Software Type | Envision | |||
| Software Version | E1.5.2 | |||
| Date of Last PM | 2025.07.26 | |||
| Is System On-Line? | Yes | |||
| CE Mark Certified? | No | |||
| SECS Interface | Yes | |||
| Electrical Requirements | 208V 3-Phase 30A | |||
| OEM Audit Available? | No | |||
| Decontamination Report Exists? | No | |||
| Can Produce Wafers AS IS? | Yes | |||
| Any Known Field Modifications? | No | |||
| All Cables Present? | Yes | |||
| Gas Panel Type | Standard | |||
| Key Common Options | Included? | |||
| Electrostatic Chuck | Yes | |||
| Wafer Clamping Method | ESC | |||
| Turbo Pump On Process Ch(s) | No | |||
| Signal Lamp Tower | Yes | |||
| Bolt-On-SMIF | No | |||
| Built-In SMIF | No | |||
| Endpoint Detection System | Yes | |||
| Endpoint Type | Monochromators | |||
| Endpoint Lam Part # | 853-11094-101 | |||
| Clean Room Manuals | No | |||
| Standard Manuals | No | |||
| Key Rainbow Mainframe Items | ||||
| Isotropic Etch Module | No | |||
| Autoloader | No | |||
| Built-In Hepa Filter | No | |||
| Orbitally Welded Gas Box | Yes | |||
| Backside Helium Cooling | Yes | |||
| Helium Cooling MFC Type | UPC | |||
| Heated Pumping Manifolds | No | |||
| On-Board RF Generators | No | |||
| Remote RF Cart | Yes | |||
| RF Cart Lam Part # | USED(Modify) | |||
| RF Match Type and Model (if not Lam) | LoFAT | |||
| Remote Gas Box | No | |||
| Remote Operator Interface | No | |||
| Main On-Board AC Distribution Type | Circuit Breaker | |||
| Remote AC Box | No | |||
| Pump Controller | No | |||
| Hine 38A Indexers | Yes | |||
| RF/Microwave Generator Details | ||||
| Chamber Position | Mfgr. | Model | ||
| PM 1 / Main Chamber | AE | PDW2200 | ||
| Gas Box Configuration | ||||
| Gas Line # | Gas | Flow (sccm) | MFC Mfgr. | MFC Model |
| 1 | AR | 1000 | Area | FC-2900V |
| 2 | CF4 | 200 | Area | FC-2900V |
| 3 | CHF3 | 50 | Area | FC-2900V |
| 4 | HE | 1000 | Area | FC-2900V |
| 5 | O2 | 100 | Area | FC-2900V |
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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