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Etch/Ash/Clean - Plasma Processing
Date of Manufacture: 2012-07-02
Currently Configured for: 300mm
Current Equipment Status: Available
Location of Equipment: Hopewell Junction, United States
Available date: Currently Available
Date of Audit 7/31/2025
Serial Number 75444
Original Ship Date from Lam 2002/2003
Wafer Size (inches) 12
Number of Cassette / FOUP Positions 3
Loadport
Make/Model Brooks V4
002-7200-21
Software Version Windows XP
Date of Last PM 6/15/2011
Is System On-Line? No
Off-Line Date (if applicable) 3/7/2024
CE Mark Certified? Yes
SECS II Interface Yes
Electrical Requirements 208v, 3ph,
OEM Audit Available? No
Decontamination
Report Exists? No
Can Produce Wafers AS IS? Yes
Any Known Field Modifications? Yes – Converted chambers to Flex45 2012
All Cables Present? Yes
Etcher Mainframe Type
Select One
2300 Version 1 (2 FOUP)
2300 Version 2 Yes
2.30E+07
2300e5 (5 position)
2300e6 (6 position)
System Configuration
Chamber Type Vintage Serial Number
PM 1 FLEX 45 2012 R23EX0195(F145429-PM1)
PM 2 FLEX 45 2012 R23EX0285RA(F144740-PM2)
PM 3 FLEX 45 2012 R23EX0311(F144741-PM3)
PM 4 FLEX 45 2011 R23EX0285(F120990-PM1)
Key Common Options Included?
Signal Lamp Tower Yes
Key Mainframe Items
Robot Type Brooks
Robot Part Number 799-000492-002 or 003 799-020826-002
OHT Configured (300mm Only) Yes / No
Key
Chamber Items
PM1 –
Endpoint Type OES
PM2 –
Endpoint Type OES
PM3 –
Endpoint Type OES
PM4 –
Endpoint Type OES
Turbo
Pump Details
Chamber
Position Turbo Mfgr. Turbo Model
PM 1 Alcatel ATH2303
PM 2 Alcatel ATH2303
PM 3 Alcatel ATH2303
PM 4 Alcatel ATH2303
RF/Microwave
Generator Details
Chamber
Position Mfgr. Model
PM 1 ENI DOFBC2-084
PM 1 ENI DOFBC2-083
PM 1 AE 3150295-011
PM 2 ENI DOFBC2-084
PM 2 ENI DOFBC2-083
PM 2 AE 3150295-011
PM 3 ENI DOFBC2-084
PM 3 ENI DOFBC2-083
PM 3 AE 3150295-011
PM 4 ENI DOFBC2-084
PM 4 ENI DOFBC2-083
PM 4 AE 3150295-011
Loadlock Pump Manufacturer Edwards Model IPX
Included With System Yes
Main Etch Chamber Pump
Manufacturer Edwards
Model IH600
Quantity
Required 4
Included With System No
Chiller Information
Manufacturer Edwards/Trillium Model 4080+
Machine Hours
Electrical Requirements 208v, 3ph, 30A
# of Cooling Channels One
Quantity Required 4
Included With System No
Gas Box Configuration
Mounting Location Side
MFC Make and Model Mykrolis/Unit/Celerity/Brooks
Line Capacity Enhanced Universal – 12 line with DGF
Gas Box P/N – PM1 571-004400-001
Gas Box P/N – PM2 571-004400-002
Gas Box P/N – PM3 571-004400-003
Gas Box P/N – PM4 571-004400-004
Gas Box P/N – PM5
Gas Box P/N – PM6
Gas Configuration
Line PM 1 PM 2 PM 3 PM 4
1 O2 – 2000 sccm O2 – 2000 sccm O2 – 2000 sccm O2 – 2000 sccm
2 C4F8 – 50 sccm C4F8 – 50 sccm C4F8 – 50 sccm C4F8 – 50 sccm
3 CF4 – 200 sccm CF4 – 200 sccm CF4 – 200 sccm CF4 – 200 sccm
4 N2 – 1000 sccm N2 – 1000 sccm N2 – 1000 sccm N2 – 1000 sccm
5 O2 – 50 sccm O2 – 50 sccm O2 – 50 sccm O2 – 50 sccm
6 CH3F – 100 sccm CH3F – 100 sccm CH3F – 100 sccm CH3F – 100 sccm
7 CO – 300 sccm CO – 300 sccm CO – 300 sccm CO – 300 sccm
8 H2 – 500 sccm H2 – 500 sccm H2 – 500 sccm H2 – 500 sccm
9 Ar – 1000 sccm Ar – 1000 sccm Ar – 1000 sccm Ar – 1000 sccm
10 CH2F2 – 50 sccm CH2F2 – 50 sccm CH2F2 – 50 sccm CH2F2 – 50 sccm
11 CH3F – 50 sccm CH3F – 50 sccm CH3F – 50 sccm CH3F – 50 sccm
12 CO2 – 1000 sccm CO2 – 1000 sccm CO2 – 1000 sccm CO2 – 1000 sccm
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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