Macquarie Semiconductor and Technology on behalf of ON Semiconductor (SCI LLC)
The images and data contained herein is owned by Macquarie and is intended for use only by potential purchasers of goods shown herein. Except for such permitted usage, no other use of the images and data is permitted and such images and data shall not be exhibited or shown in any websites or social media or for any commercial purposes without Macquarie’s written permission. Therefore, no seller of goods like the goods shown herein has any right or authority to show or exhibit any images or data shown herein.
Etch/Ash/Clean - Plasma Processing
Date of Manufacture: 2003-07-01
Currently Configured for: 300mm
Current Equipment Status: Available
Location of Equipment: Hopewell Junction, United States
Available date: Currently Available
| Date of Audit | 7/31/2025 | ||||
| Serial Number | 52697 | ||||
| Original Ship Date from Lam | 2003 | ||||
| Wafer Size (inches) | 12 | ||||
| Number of Cassette / FOUP Positions | 2 | ||||
| Loadport Make/Model | 1 x Brooks V4 | ||||
| 002-7200-21 | |||||
| Software Version | N/A – UI CPU is not functional | ||||
| Date of Last PM | 4/5/2011 | ||||
| Off-Line Date (if applicable) | 1/10/2017 | ||||
| CE Mark Certified? | Yes | ||||
| SECS II Interface | Yes | ||||
| Electrical Requirements | 208v, 3ph, 400A to mainframe | ||||
| 208v, 3ph, 150A to RPDB | |||||
| Any Known Field Modifications? | Yes – Gas Flow Box upgrade for PM4 10/11/2007, Coolant line temp probe upgrades for all chambers in 2014 | ||||
| All Cables Present? | Yes | ||||
| Etcher Mainframe Type | Select One | ||||
| 2300 Version 1 (2 FOUP) | Yes | ||||
| System Configuration | |||||
| Chamber Type | Vintage | Serial Number | |||
| PM 1 | Exelan DD | 2003 | 23EX0320(F52697-PM1) | ||
| PM 2 | Exelan DD | 2003 | 23EX0321(52697-PM2) | ||
| PM 3 | Exelan DD | 2003 | 23EX0322(F52697-PM3) | ||
| PM 4 | Exelan DD | 2003 | 23EX0323(F52697-PM4) | ||
| Key Common Options | Included? | ||||
| Signal Lamp Tower | Yes | ||||
| Key Mainframe Items | |||||
| Robot Type | Brooks | ||||
| Robot Part Number | 799-000492-002 or 003 | ||||
| 799-020826-002 | |||||
| OHT Configured (300mm Only) | Yes | ||||
| Key Chamber Items | |||||
| PM1 – Endpoint Type | OES | ||||
| PM2 – Endpoint Type | OES | ||||
| PM3 – Endpoint Type | OES | ||||
| PM4 – Endpoint Type | OES | ||||
| Turbo Pump Details | |||||
| Chamber Position | Turbo Mfgr. | Turbo Model | |||
| PM 1 | Alcatel | ATH1600 | |||
| PM 2 | Alcatel | ATH1600 | |||
| PM 3 | Alcatel | ATH1600 | |||
| PM 4 | Alcatel | ATH1600 | |||
| RF/Microwave Generator Details | |||||
| Chamber Position | Mfgr. | Model | |||
| PM 1 | ENI | DOFBC2-084 | |||
| PM 1 | ENI | DOFBC2-083 | |||
| PM 2 | ENI | DOFBC2-084 | |||
| PM 2 | ENI | DOFBC2-083 | |||
| PM 3 | ENI | DOFBC2-084 | |||
| PM 3 | ENI | DOFBC2-083 | |||
| PM 4 | ENI | DOFBC2-084 | |||
| PM 4 | ENI | DOFBC2-083 | |||
| Chiller Information | |||||
| Manufacturer | Edwards/Trillium | ||||
| Model | 4080+ | ||||
| Electrical Requirements | 208v, 3ph, 30A | ||||
| # of Cooling Channels | One | ||||
| Quantity Required | 4 (only 2 installed) | ||||
| Included With System | No | ||||
| Gas Box Configuration | |||||
| Mounting Location | Side | ||||
| MFC Make and Model | Mykrolis/Unit/Celerity/Brooks | ||||
| Line Capacity | Enhanced Universal – 12 line | ||||
| Gas Box P/N – PM1 | 571-004400-001 | ||||
| Gas Box P/N – PM2 | 571-004400-002 | ||||
| Gas Box P/N – PM3 | 571-004400-003 | ||||
| Gas Box P/N – PM4 | 571-004400-004 | ||||
| Gas Configuration | |||||
| Line | PM 1 | PM 2 | PM 3 | PM 4 | |
| 1 | O2 – 2000 sccm | O2 – 2000 sccm | O2 – 2000 sccm | O2 – 2000 sccm | |
| 2 | C4F8 – 50 sccm | C4F8 – 50 sccm | C4F8 – 50 sccm | C4F8 – 50 sccm | |
| 3 | CF4 – 200 sccm | CF4 – 200 sccm | CF4 – 200 sccm | CF4 – 200 sccm | |
| 4 | N2 – 1000 sccm | N2 – 1000 sccm | N2 – 1000 sccm | N2 – 1000 sccm | |
| 5 | O2 – 50 sccm | O2 – 50 sccm | O2 – 50 sccm | O2 – 50 sccm | |
| 6 | CH3F – 100 sccm | CH3F – 100 sccm | CH3F – 100 sccm | CH3F – 100 sccm | |
| 7 | CO – 300 sccm | CO – 300 sccm | CO – 300 sccm | CO – 300 sccm | |
| 8 | H2 – 500 sccm | H2 – 500 sccm | H2 – 500 sccm | H2 – 500 sccm | |
| 9 | Ar – 1000 sccm | Ar – 1000 sccm | Ar – 1000 sccm | Ar – 1000 sccm | |
| 10 | CH2F2 – 50 sccm | CH2F2 – 50 sccm | CH2F2 – 50 sccm | CH2F2 – 50 sccm | |
| 11 | CH3F – 50 sccm | CH3F – 50 sccm | CH3F – 50 sccm | CH3F – 50 sccm | |
| 12 | NF3 – 100 sccm | NF3 – 100 sccm | NF3 – 100 sccm | NF3 – 100 sccm | |
| Main Etch Chamber Pump | |||||
| Manufacturer | Edwards | ||||
| Model | IH600 | ||||
| Quantity Required | 4 | ||||
| Included With System | No | ||||
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
Get in touch
Ask about our equipment solutions, ranging from Macquarie equipment inventory sales, sourcing programs, surplus disposition options, and direct equipment purchases.
