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Etch/Ash/Clean - Plasma Processing
Date of Manufacture: 2003-07-01
Currently Configured for: 300mm
Current Equipment Status: Available
Location of Equipment: Hopewell Junction, United States
Available date: Currently Available
Date of Audit 7/31/2025
Serial Number 52697
Original Ship Date from Lam 2003
Wafer Size (inches) 12
Number of Cassette / FOUP Positions 2
Loadport Make/Model 1 x Brooks V4
002-7200-21
Software Version N/A – UI CPU is not functional
Date of Last PM 4/5/2011
Off-Line Date (if applicable) 1/10/2017
CE Mark Certified? Yes
SECS II Interface Yes
Electrical Requirements 208v, 3ph, 400A to mainframe
208v,
3ph, 150A to RPDB
Any
Known Field Modifications? Yes – Gas Flow Box upgrade for
PM4 10/11/2007, Coolant line temp probe upgrades for all chambers in 2014
All Cables Present? Yes
Etcher
Mainframe Type Select One
2300
Version 1 (2 FOUP) Yes
System Configuration
Chamber Type Vintage Serial
Number
PM
1 Exelan DD 2003 23EX0320(F52697-PM1)
PM 2 Exelan DD 2003 23EX0321(52697-PM2)
PM 3 Exelan DD 2003 23EX0322(F52697-PM3)
PM 4 Exelan DD 2003 23EX0323(F52697-PM4)
Key
Common Options Included?
Signal
Lamp Tower Yes
Key
Mainframe Items
Robot
Type Brooks
Robot Part Number 799-000492-002 or 003
799-020826-002
OHT
Configured (300mm Only) Yes
Key
Chamber Items
PM1 –
Endpoint Type OES
PM2 –
Endpoint Type OES
PM3 –
Endpoint Type OES
PM4 –
Endpoint Type OES
Turbo Pump Details
Chamber Position Turbo Mfgr. Turbo Model
PM
1 Alcatel ATH1600
PM 2 Alcatel ATH1600
PM 3 Alcatel ATH1600
PM 4 Alcatel ATH1600
RF/Microwave Generator Details
Chamber Position Mfgr. Model
PM 1 ENI DOFBC2-084
PM 1 ENI DOFBC2-083
PM
2 ENI DOFBC2-084
PM 2 ENI DOFBC2-083
PM 3 ENI DOFBC2-084
PM 3 ENI DOFBC2-083
PM 4 ENI DOFBC2-084
PM 4 ENI DOFBC2-083
Chiller Information
Manufacturer Edwards/Trillium
Model 4080+
Electrical Requirements 208v, 3ph, 30A
# of Cooling Channels One
Quantity Required 4 (only 2 installed)
Included With System No
Gas Box Configuration
Mounting Location Side
MFC
Make and Model Mykrolis/Unit/Celerity/Brooks
Line Capacity Enhanced Universal – 12 line
Gas Box
P/N – PM1 571-004400-001
Gas Box
P/N – PM2 571-004400-002
Gas Box
P/N – PM3 571-004400-003
Gas Box
P/N – PM4 571-004400-004
Gas Configuration
Line PM 1 PM 2 PM 3 PM 4
1 O2 – 2000 sccm O2 – 2000 sccm O2 – 2000 sccm O2 – 2000 sccm
2 C4F8 – 50 sccm C4F8 – 50 sccm C4F8 – 50 sccm C4F8 – 50 sccm
3 CF4 – 200 sccm CF4 – 200 sccm CF4 – 200 sccm CF4 – 200 sccm
4 N2 – 1000 sccm N2 – 1000 sccm N2 – 1000 sccm N2 – 1000 sccm
5 O2 – 50 sccm O2 – 50 sccm O2 – 50 sccm O2 – 50 sccm
6 CH3F – 100 sccm CH3F – 100 sccm CH3F – 100 sccm CH3F – 100 sccm
7 CO – 300 sccm CO – 300 sccm CO – 300 sccm CO – 300 sccm
8 H2 – 500 sccm H2 – 500 sccm H2 – 500 sccm H2 – 500 sccm
9 Ar – 1000 sccm Ar – 1000 sccm Ar – 1000 sccm Ar – 1000 sccm
10 CH2F2 – 50 sccm CH2F2 – 50 sccm CH2F2 – 50 sccm CH2F2 – 50 sccm
11 CH3F – 50 sccm CH3F – 50 sccm CH3F – 50 sccm CH3F – 50 sccm
12 NF3 – 100 sccm NF3 – 100 sccm NF3 – 100 sccm NF3 – 100 sccm
Main Etch Chamber Pump
Manufacturer Edwards
Model IH600
Quantity Required 4
Included With System No
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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