Macquarie Semiconductor and Technology on behalf of Intel Ireland Ltd.
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Critical Dimension (CD) Measurement (non SEM)
Date of Manufacture:
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Leixlip, Ireland
Available date: Currently Available
LITHOSHAPE 11Ki main attributes / components
• LithoShape 11Ki 1276 - 300mm KLA OPTICAL SHAPE MEASUREMENT SYSTEM
• High performance Optical Shape measurement system for advanced applications
• Deep UV to Visible Continuous Broadband Spectroscopic Ellipsometer (BBSE) with Laser Driven Light Source (LDLS) (190 - 900nm)
• Laser-Driven Spectroscopic Reflectometer (LDSR): Wavelength range 190nm-900nm
• Main Computer: V7.5 (Intel Xeon 2.5GHZ, 4-core, 32GB RAM, 2x240GB
• SSD, 2 TB SATA HD ,DVI, GB Ethernet)
• OS: Win7 (64bit)
• UI: Color 19 " SXGA LCD with Keyboard, trackball, DVD ROM
• Environmental Control: Temperature, Pressure, ULPA filter
• Low Contact Ceramic Chuck
• GFI protected and SEMI F47 compliant AC power distribution
• SEMI S2, S8 compliant
• Start-Up Kit and Baseline Wafer kit.
• CFS 6.40
• Feature, BBSE, LS11K
• Option,LDSR,Viking
• KIT,Intg,LDSR,Viking,LS11K
• LS11K Compensator
• KIT,Assy,N2 Lockout valve
• KIT,Assy,ACPDU Lockout Bracket
• KIT,SeismicRestraint,SS11K
• AMC Filter
• Wafer,300MM,Metrocal
• License config packg,LS11Ki
• GEM/SECS and RS232
Software that controls communication between Equipment and customer Host system, (RS232 Serial Binary Data Exchange)
• HSMS - High Speed Messaging system
• E87 (Based on E39)
• E87 Carrier Management Services (Based on E39)
• -Tool software that manages automated and manual carrier (FOUP) transfers to and from the equipment
- Based on E39 Object Services
• E40/E94/E90
• E40 Process Job Management, E94 Control Job Management and E90
• Substrate Tracking
• -Tool software that manages Process Jobs (E40), Control Jobs (E94 based on E39), and Substrate Tracking (E90 based on E39)
Additional Items–
|
Part Number |
Description |
Qty |
|
82-164250 |
WFR,6000A ALUMINUM,1% SI,UN |
1 EA |
|
0752084-000 |
PHX Q2.2,SFN,WF/N,KWSV,CWP/S,OFMI,LS10K |
1 EA |
|
0299903-000 |
ASSY,CHUCK W/STRESS & WTM,CERAMIC,300MM |
1 EA |
|
0772942-000 |
FEATURE,LWR CHASS/ELECT,40A AC,2GFI,LOTO |
1 EA |
|
0320854-000 |
OPT,OHT,HOKUYO,DMG,QUAD |
1 EA |
|
0600623-000 |
OPT,CID,OMRON V640 V4,SFN,PHX,QFIM |
1 EA |
|
0776945-000 |
KIT, HOSE, FAC INTERFACE PLATE, LS11K |
1 EA |
|
0839797-000 |
LABEL, SYS ID, CE, 40A, MADE IN ISRAEL 2 EA |
2 EA |
|
0287152-000 |
E84 enabled for OHT, 3LP |
1 EA |
|
0972012-000 |
KIT, WAFERS, 300MM, BASELINE SET, CD |
1 EA |
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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