Macquarie Semiconductor and Technology on behalf of Macquarie (Asia) Pte Ltd. - UMC
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Date of Manufacture: 2002-06-04
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Singapore, Singapore
Available date: Currently Available
Tool config is based on original PO, please verify tool details at tool inspection
General System Info
Manufacturer: ASML
Platform: AT
Stepper or Scanner: Scanner
Model: AT750C
Directory of Models: KrF (248nm)
Machine Serial Number: 6633
Original Manufacture Date: 04Jun2002
System Operating System: SUN Netra 240
Software version: 4.1.0
System Configuration
Wafer Size (inch): 12
Track Configuration: Linked
Track/Wafer Interface: Track
Track Type: TEL
Directory of Source OEMs
OSRAM, USHIO: Lamp
Cymer: Cymer ELS6600
System Compliance
SEMI Safety Compliant: S2
SECS/GEM Capable: II
System Condition
Date of Last PM: 18-Jan-24
Fingerprint Available? NO
ATP / SAT Available? YES
System lifetime wafer count: NA
Source Age (pulses / hours): NA
System Status: Off-Line
Can Produce Wafers as-is? NO
Off-Line Date (if applicable): 18-May-24
OEM Audit Available? NO
3rd Party Audit Available? NO
Decontamination Report? NO
All cabling present? YES
Manuals Available: NO
Any Field Modifications? NO
System Options (as built)
Configuration Sheet Avail? YES
Air Filtration
Make: ESI
Model: E3000
Reticle Set / Reticles: NA
CIP and Field Upgrades: NA
Damage/Missing parts list
Please inspect tool to reconfirm
Dry pumps and customer provided items not included on sales
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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