Macquarie Semiconductor and Technology on behalf of Micron Technology Taiwan, Inc. (F11)
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Date of Manufacture:
Currently Configured for: 300mm
Current Equipment Status: Available
Location of Equipment: Taoyuan, Taiwan
Available date: 11/28/2025
Process: TEOS
Tool config is based on original PO, please verify tool details at tool inspection
OEM: HIKE
Tool Model: Q2LN
System Power Rating: 120/480V
Loading Configuration: 5 LOTS
Chamber Name 1: 1
Furnace Unit
Cartridge Heater: D4EX22250- RHC2 Heater(With sub-heater)
T/C for Heater Control: D4EX15442
T/C for Sub Heater Control: None
T/C for Over temperature Protection: D4EX15442
5-P T/C for Cascade Control: D7EX38668- L type(5P)
5-P T/C for Profile Control:None- OPTION
1-P T/C for Profile Control: D7EX37746- OPTION (1pc/Film)
Thyristor Unit for Control: SKKT160L5Z3F-HKD
Clean Unit
Clean Module Unit:
BV-R14TF2G1?- Wafer transfer area(Transfer)
BV-R09TF2G1L- Wafer transfer area(Loading Area)
PCF-4EKD3750- Rotation FOUP Storage(Upper)
PCF-8EKD3796- Rotation FOUP Storage(Lower)
Controller
Main Controller?OU?: D4EX38403(KDSC-2007)- Made by HKDE
Main Operation Unit: TM150-HKT02
Sub Operation Unit: D4EX40577(KDSC-2010)
Process Module Controller: D4EX36773(PMC5000)
DDC Temperature Controller: D4EX36151(CQ1720)- CPU +TC Unit
Gate Drive Unit: D4EX36969(DN-150VR-T5
MFC / Pressure Unit: D4EX36215(MFCDNET2)- DeviceNet Remote
FOUP Loader Controller Unit: D4EX36774(Robo5000)- Main Unit
Wafer Handling Controller Unit: D4EX36758(Robo5000)- Sub Unit
Valve / Interlock Control Unit: CJ1G-CPU43H- Made by Omron
Switching HUB: FL SWITCH SFN 8TX
Signal Tower (Front): LME-402W-RBYG- Red, Blue, Yellow, Green
Gas Flow Pattern Panel: D7EX39730
EDA Controller: D4EX38401 (EDA)
EDA Operation Unit: TM150-HKT02
Drive Mechanisms
I/O Shutter
AGV/PGV/OHT Stage
FOUP Loader
Rotation FOUP Storage- FOUP receipt number : 16
FOUP Opener- 2 Ports
Wafer Detection- 25 in one lot.
Wafer Transfer- Lift Transfer
Variable Wafer Pitch Converter
Boat Elevator
Boat Changer
Furnace Port Shutter
Boat Rotation
Broken Wafer Detector- None
Wafer Transfer Crash Detector
Tweezer Pitch check mechanism- None
Gas System
Gas Unit(IGS)- N2, O2, TEOS
Tape Heater for gas pipe- TEOS Line
Exhaust System
Dry Pump& Mechanical Booster Pump- IH1800 (Made by EDWARDS/Prepared By User)
Diaphragm Sensor (1000Torr)- 631C13T8FH (Made by MKS)
Diaphragm Sensor (2Torr)- 631C02T8FH (Made by MKS)
ATM SENSOR- PA830 102G-VCR?SENSOR ) PZ200?DISPLAY)- (Made by COPAL)
Piezo Valve for Pressure Control- PV-2203MC (Made by STEC)
Main Valve- IVBH100SDVXF8VXF8A-NWF-55(RS) (Made by KITZ)
Exhaust Piping
Exhaust Dilution Line
Reactor Tube Press Leak Line
Back Ground Line- TEOS
Tape Heater For Exhaust Line
Jacket Heater for exhaust pipe- D4EX23043 (Made by MKS)
Seal Cap Heater- ESH-13049-02 (Made by SHINWA VANES)
Inlet Heater- ESH-12753-01 (Made by TOKYO GIKEN)
Valve Heater- ML-H4F-1B (Made by FUJIKIN)
Safety
Light Curtain System- SL-C52H (Made by KEYENCE)
Other
AGV I/F UNIT- None
OHT I/F UNIT- Prepared By User (E84 Sensor)
GATEWAY-HSMS- 9700-9961-01 (Made by ASYST)
RF ID READER- 9700-9960-01 (Made by ASYST)
ANTENNA- 9700-6224-03/04 (Made by ASYST)
CANTEE- 9700-9171-01 (Made by ASYST)
CHEMICAL FILTER- (Made by TOAMEC)
N2 Purge Load Lock System
O2 Monitor / Detector- TF-21D201(RX-105063-A) (Made by Energy Support)
FOUP Opener N2 Purge SYSTEM- (Made by Hitachi Kokusai)
Loading Area MFC- (Made by Tokyo Keiso)
Loading Area N2 Purge Line- HM5143A20AR (Made by Hitachi Kokusai)
FOUP Opener N2 Purge Line- (Made by Hitachi Kokusai)
Missing/Damaged Parts List
None report, please inspect tool to reconfirm
Dry pumps not included
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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