Macquarie Semiconductor and Technology on behalf of Micron Memory Japan, K.K. (F15)
The images and data contained herein is owned by Macquarie and is intended for use only by potential purchasers of goods shown herein. Except for such permitted usage, no other use of the images and data is permitted and such images and data shall not be exhibited or shown in any websites or social media or for any commercial purposes without Macquarie’s written permission. Therefore, no seller of goods like the goods shown herein has any right or authority to show or exhibit any images or data shown herein.
PVD (Physical Vapor Deposition)
Date of Manufacture: 2018-06-01
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Hiroshima, Japan
Available date: Currently Available
Tool config is based on original PO, please verify tool details at tool inspection
OEM: AMAT
Tool Model: ENDURA2
Software Version (include revision #): enB3.2_75
System Power Rating: 400VAC, 3PHASE STAR / 208VAC, 3 PHASE STAR
Loading Configuration: 3 load ports
Chamber Name 1: Chm/Unit Position 2
Chamber Name 2: Chm/Unit Position 3
Chamber Name 3: Chm/Unit Position 4
Chamber Name 4: Chm/Unit Position E
Chamber Name 5: Chm/Unit Position F
Chamber 1 Description: RF TIN
Chamber 2 Description: RF TIN
Chamber 3 Description: RF TIN
Chamber 4 Description: DMD
Chamber 5 Description: DMD
Chamber 1 Chemicals Gases Used: Ar/N2
Chamber 2 Chemicals Gases Used: Ar/N2
Chamber 3 Chemicals Gases Used: Ar/N2
Chamber 4 Chemicals Gases Used: N2
Chamber 5 Chemicals Gases Used: N2
Non OEM Tool 1: Controller
Non OEM Model 1: FES (CGA)
Non OEM Tool 2: MFC/Pressure Unit
Non OEM Model 2: GF-125C, DNET 1-1 -SEAL
Non OEM Tool 3: Drive Mechanisms
Non OEM Model 3: NA
Non OEM Tool 4: FOUP Opener
Non OEM Model 4: RORZE (0190-61471)
Damage/Missing parts list
No missing or damaged parts.
Please inspect tool to reconfirm
Dry pumps and customer provided items not included on sales
No missing or damaged parts.
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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