Macquarie Semiconductor and Technology on behalf of Micron Technology Taiwan, Inc. (F11)
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Etch/Ash/Clean - Plasma Processing
Date of Manufacture:
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Taoyuan, Taiwan
Available date: Currently Available
11-3AMAT_PREXT_OX_03
Dry Etch
Tool config is based on original PO, please verify tool details at tool inspection
Micap #: 1303380
Micron MISTI/LID #: APXTB70100
Vendor Tool Serial #: 420804
Any defective or missing parts: No
Any modification/conversion/refrofit was perform to the tool? No
OEM: AMAT
Tool Model: PREXT
System Power Rating: 208 AC 3-Phase for system
Loading Configuration: 3 load ports
Retrofit Part Type 1: NA
Chamber Name 1: A
Chamber Name 2: B
Chamber Name 3: C
Chamber 1 Description: PRODUCER twin chamber
Chamber 2 Description: PRODUCER twin chamber
Chamber 3 Description: PRODUCER twin chamber
Chamber 1 Chemicals Gases Used: Cl2, NF3, H2, CH2F2, CF4, O2, N2, CHF3, Ar
Chamber 2 Chemicals Gases Used: Cl2, NF3, H2, CH2F2, CF4, O2, N2, CHF3, Ar
Chamber 3 Chemicals Gases Used: Cl2, NF3, H2, CH2F2, CF4, O2, N2, CHF3, Ar
Not Sold with Tool Description 1: NA
N2 Load Port Exists 1: No
N2 OEM Stage Available 1: Yes
N2 Load Port Exists 2: No
N2 OEM Stage Available 2: Yes
N2 Load Port Exists 3: No
N2 OEM Stage Available 3: Yes
N2 Load Port Exists 4: No
N2 OEM Stage Available 4: Yes
Optional Gas 1: #1
Optional Gas 2: #2
Optional Gas 3: #3
Optional Gas 4: #4
Optional Gas 5: #5
Optional Gas 6: #6
Optional Gas 7: #7
Optional Gas 8: #8
Optional Gas 9: #9
Optional Gas 10: #10
Optional Gas 11: #11
Optional Gas 12: #12
Custom Gas Lines 1: Cl2, 250sccm
Custom Gas Lines 2: NF3, 500sccm
Custom Gas Lines 3: H2, 2000sccm
Custom Gas Lines 4: CH2F2, 100sccm
Custom Gas Lines 5: CF4, 700sccm
Custom Gas Lines 6: CF4, 100sccm
Custom Gas Lines 7: O2, 100sccm
Custom Gas Lines 8: O2, 2000sccm
Custom Gas Lines 9: N2, 200sccm
Custom Gas Lines 10: CHF3, 200sccm
Custom Gas Lines 11: Ar, 100sccm
Custom Gas Lines 12: Ar, 1000sccm
Damage/Missing parts list
Please inspect tool to reconfirm
Dry pumps and customer provided items not included on sales
Tool config is based on original PO, please verify tool details at tool inspection
Software Version: B3.0_52
Chm Position 1: PRODUCER Chemicals / Gases Used: Cl2, CHF3, CF4, O2
Chm Position 2: PRODUCER Chemicals / Gases Used: Cl2, CHF3, CF4, O2
Chm Position 3: PRODUCER Chemicals / Gases Used: Cl2, CHF3, CF4, O2
Remote Components
Cathode chiller:SMC-496 Qty 3/ 208 AC 3-Phase (not include with tool sales)
Wall chiller:SMC-H2000 Qty 1/ 208 AC 3-Phase (not include with tool sales)
Standard Spec
Software Revision: VERSION 2.5
Wafer Size: Diameter 300+/- 0.05mm(SEMI M28), 775 +/- 25um, Notch
Carrier: FOUP (Comply with SEMI E47.1 (25wafers))
Load Port: 3 Loadport
Interface A: Hardware related to EDA
Facility Plate: N2 Regulator : Supplied by customer in floor, CDA regulator 125 PSI onboard SMC pressure switch
Facility Plate: Manual Valve : Supplied by customer in floor
Facility Plate: Pressure Gauge : Supplied by customer on regulator in floor
Anti-corrosion Package: Enhanced Corrosion abatement material for FI
Anti-corrosion Package: Side Storage Pods (Left)
Anti-corrosion Package: Exhaust Mid Deck and Plenum for FI
Anti-corrosion Package: Heated SWLL
Loader Mod Corrosion Preventio: TDK Corrosion Resistant
Fittings: No brass fittings
Loadlock Pressure Monitor: GAUGE CONVECTRON 1MTORR-1000TORR 1/4FVCR DNET, 3310-01187
Transfer Pressure monitor: GAUGE CONVECTRON 1MTORR-1000TORR 1/4FVCR DNET, 3310-01187
Transfer Pressure monitor: 5 SLM N2 MFC, software regulated, 3030-14249
Signal Tower: KIT, 4 LIGHT, DNET CONFIGURABLE LIGHT TOWER, 5.3 F
EMO: Front x3, Rear x3
Cable Length: RF SOURCE CABLE TRU-9957-07, RF BIAS CABLE TRU-9958-21
Cable Length: Monitor 1/2 cables : 25 ft (16 ft effective, AMAT#0395-00104)
Cable Length: Pump Cable : 75 ft
Monitor: Monitor-1 : Flat Panel with Keyboard on Stand (AMAT#395-00099)
Monitor: Monitor-2 : Flat Panel with Keyboard on Stand (AMAT#0395-00099)
IPUP: Alcatel IPUP , P/N 0190-22363
Inter Locks: On board interlocks to dissable RF and gas flow at half atmosphere, lid or gas panel door open, and H2 over press.
Inter Locks: On board interlocks to disable robots and slit doors when transfer lid or load lock lids are open.
Supporting Remote
Etch Common AC Rack: Lean AC Rack
Heat Exchanger WALL: H2000 Heat Exchanger Wall
Heat Exchanger CATHODE: SMC 496 Heat Exchanger Cath (new DI -solenoid valve with new tolerance)
HX Control Cable Length: 75 Feet
Heat Exchanger Hose Length: 75 Feet
Water Box: Water Box
Source RF Generator: Apex 2760 2.7KW 60 Mhz
Source RF Matcher: RF MATCH, 60 MHZ, 5 KV, 50 A AE NAVIGATOR 2060, PRODUCER ETCH SOURCE
Bias RF Generator: Apex 5513 5.5Kw 13.5Mhz
Bias RF Matcher: RF MATCH, 13.56 MHZ, 4 KV, 50 A AE NAVIGATOR 5513, PRODUCER ETCH BIAS
ESC high Voltage Power Supply: CT HV MODULE ASSY. 5KV, CESC
Mainframe Robot: VxP w/DP blade and 3 Pt orings
OCR: KA3 backside OCR kit
OCR: KA3 backside Camera
Orienter: Prealigner kit
Orienter: Prealigner
Soft chuck: Soft chuck on pre-aligner
Hardware Config
Process Chb.1,2,&3: Producer eXT Poly Process
Chamber Config
Electrode: Y2O3 GDP Dual Zone
He Control: Single Zone
Cathode Outer Cover: None
Cathode Sleeve: KIT, Cathose Sleeve Y2O3 (full coat)
Endpoint type: H.O.T. Pack
Slit Valve Liner Door: KIT, Slit Cover Door with Y2O3, Producer Etch XT
Oring for Slit Valve: 8575 Kalrez
Hoop Assy: New Hoop Assy
Lift Pins: New Lift Pins
Turbo screens: Removable Turbo Screens
He Dump Kit: He Dump Kit
Chamber Divider: Installed
TMP: KIT SEKIO SEIKI STP-F2203C
Pump Cable Length: 75" Pump Interface Cable
Dry Pump Interface: Pump Interface Cable
Dry Pump Breaker Amp: 40A
Gas Break: Spiral 0040-54702 (electrode assy)
Gas Break O-ring: Gas Break O-ring
Pressure Monitor: Service : SXDCRPRESS 100TORR 1/2FVCR 0-10V OUT 0.5%ACC 9P-D
Pressure Monitor: Process Chamber : XDCR PRESS 1TORR 1/2FVCR 15P-D 45DEG-C MANOMETER
Pressure Monitor: ATMOSPHERE SWITCH: MKS 760 torr switch
Pressure Monitor: 1/2 ATMOSPHERE SWITCH: MKS 75 torr switch
Pressure Monitor: FORELINE : Manometer
Gas Box Config
Gas Pallet: ASSY, FULL 6/6 PALLET, 300MM ETCH NEXT GEN
Regulators: Regulator on SLD for inlet to gas panel (1 per unique gas, 12 max, VCR connection)
Transducers: Transducers inside MFC's
Device Net MFCs: Unit 125 Multiflo PTI
Filters: MYKROLIS (nickel, VCR)
Filters: Nippon (VCR 12 max)
FRC Location: at Gas Panel (setting = 1000/1000)
Gas Panel Exhaust: TOP EXHAUST
Gas Panel Facilities Hook Up: SINGLE LINE DROP
Piping: Standard high purity stainless & Exhaust through Gas box)
H2 Gas Leak Detection Port: H2 Gas leak detect board circutry supplied for use with external(with interface to customer-supplied toxic gas leak detectors)
Final Pressure Switch: At 600 Torr from gas pallet, at chambers 75 torr
Damage/Missing parts list
Please inspect tool to reconfirm
Dry pumps and customer provided items not included on sales
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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