ASM International Eagle-12 Rapidfire

Equipment details:

Date of Manufacture:

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Taichung City, Taiwan

Available date: Currently Available

Tool config is based on original PO, please verify tool details at tool inspection

Process: TEOS

Chamber Qty:3

Overall Tool Condition

Any Field Modifications: No

All Cables present: Yes

Any Corrosion visible on modules: No

Any Missing / Damaged Parts: No

Shipping Brackets Included: No

Wafer Handler: Yes

Handler Type ATM, vacuum

# of Cassette / FOUP Loaders: 3 FOUP loaders

Robot Type: Signal arm

End-Effecter Type: Self-aligner

Pre-Aligner: No

Mini-Environment: Yes

System Software

System SW (OS) version: WindowsXP 5.1 2600

System SW (App) version: VER1.10b

SEMI Std Options: E84

Communication Interface

GEM / SECS: GEM

HSMS: yes

Supporting Equipment

Power Supply: AC 208V 3 phases, 50/60 Hz

AC Dist Box: Yes

Ext Transformer: No

UPS: Yes

Heat Exchanger / Chiller: No

Backing Pump(s): No

Damage/Missing parts list

Please inspect tool to reconfirm

Dry pumps and customer provided items not included on sales