Macquarie Semiconductor and Technology on behalf of Micron Memory Taiwan Co., Ltd. (F16)

ASM International Eagle-12 Rapidfire


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Asset ID: 185487

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ASM International

Eagle-12 Rapidfire

PECVD (Chemical Vapor Deposition)

Deposition Equipment

Equipment details:

Date of Manufacture:

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Taichung City, Taiwan

Available date: 9/4/2024

Tool config is based on original PO, please verify tool details at tool inspection

Process: TEOS

Chamber Qty:3

Overall Tool Condition

Any Field Modifications: No

All Cables present: Yes

Any Corrosion visible on modules: No

Any Missing / Damaged Parts: No

Shipping Brackets Included: No

Wafer Handler: Yes

Handler Type ATM, vacuum

# of Cassette / FOUP Loaders: 3 FOUP loaders

Robot Type: Signal arm

End-Effecter Type: Self-aligner

Pre-Aligner: No

Mini-Environment: Yes

System Software

System SW (OS) version: WindowsXP 5.1 2600

System SW (App) version: VER1.10b

SEMI Std Options: E84

Communication Interface


HSMS: yes

Supporting Equipment

Power Supply: AC 208V 3 phases, 50/60 Hz

AC Dist Box: Yes

Ext Transformer: No

UPS: Yes

Heat Exchanger / Chiller: No

Backing Pump(s): No

Damage/Missing parts list

Please inspect tool to reconfirm

Dry pumps and customer provided items not included on sales

Product images

The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.

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