Macquarie Semiconductor and Technology on behalf of Micron Technology Taiwan, Inc. (F11)

Sumitomo Precision Products Co., Ltd. SGRC Series

Asset ID: 211135

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Sumitomo Precision Products Co., Ltd.

SGRC Series

Ozone Generator

Support Equipment (Fab)

Equipment details:

Date of Manufacture:

Currently Configured for: N/A

Current Equipment Status: Available

Location of Equipment: Taoyuan, Taiwan

Available date: Currently Available

OEM: Sumitomo Precision Products Co, Ltd.

Model: SGRC-02GS-025, ozone generator



Reference from OEM :

SGRC/SGRP/SGRF series

Specification of equipment example 1(SGRP-03JS)
Ozone concentration350g/m3(N)
Ozone gas flow rate15L/min (5L/min x 3Line)
Cooling water temperature20°C±2°C
DimensionsW570mm x D850mm x H1,870mm
Weight360kg
Power200-220VAC, 3-phase


Specification of equipment example 2(SGRF-03JA)
Ozone concentration400g/m3(N)
Ozone gas flow rate20L/min
Cooling water temperature5°C
DimensionsW570mm x D850mm x H1,836mm
Weight350kg
Power200-220VAC, 3-phase


Features
Capable of supplying either large capacity ozone gas with one line or multi lines by individual control
High concentration; Up to 400g/m3(N)
Abundant product line up; Small to large capacity.
High pressure; max.0.3MPa(SGRP series)
Nitrogen doping free(SGRF series)
High pressure tolerance, Long life cycle discharging cell
Quick start-up, Quick response
Stable concentration by integrated with ozone monitor(Closed-loop control)
CE, NRTL, SEMI standard applicable
Piping material; Select from 316LSS or PFA


Performance curve

SGRF-03XA Performance curve

Product images

The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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