Tokyo Electron Ltd. (TEL) CLEAN TRACK ACT 12

Equipment details:

Date of Manufacture:

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Taoyuan, Taiwan

Available date: Currently Available

Tool config is based on original PO, please verify tool details at tool inspection

OEM: TEL

Tool Model: ACT12

Damage/Missing parts list

Please inspect tool to reconfirm

Dry pumps and customer provided items not included on sales

Missing parts-

Developed tank is not used. 

2-1: Sol valve 

2-2: VAC valve

2-2: Spin chuck

2-3: Exhaust pipe loose

2-3: E box cover

2-3: Spin chuck

2-3: X axis cover

2-3: Arm2 motor

2-4: Arm2 motor

2-4: X axis cover

2-5: Lost sol valve

2-0: opation tower Rex-controller

2-28: Sol valve cable a'ssy

2-28: Sol valve L cover

2-29: Sol valve L cover

2-29: SSR

2-30: Sol valve L cover

2-15: Sol valve L cover

2-22: Sol valve L cover

2-23: Sol valve L cover

2-24: Sol valve L cover

3-0: X axis cover a'ssy

4-7: Sol valve L cover

4-9: Sol valve L cover

4-12: Signal cable a'ssy

4-12: Sol valve a'ssy

4-12: Relay modeule a'ssy

4-12: SSR a'ssy

4-12: Sol valve cover 

4-13: Sol valve cover 

4-13: Signal cable a'ssy

4-13: Shutter ring 

4-13: Chamber up/down cylinder 

4-14: Sol valve L cover

4-15: Sol valve L cover

4-17: Sol valve L cover

4-20: Sol valve L cover

4-21: Sol valve L cover

4-22: Sol valve L cover

4-23: Sol valve L cover

4-24: Sol valve L cover

5-0: Fork

Alarm list & bypass module

2-1 Ext.controller error detect

2-1 Exhaust error

2-1 Cup sensor error

2-2 bypass

2-3 bypass

2-4 bypass

All plate & WEE & IFB bypass