Macquarie Semiconductor and Technology on behalf of Qorvo US, Inc.
The images and data contained herein is owned by Macquarie and is intended for use only by potential purchasers of goods shown herein. Except for such permitted usage, no other use of the images and data is permitted and such images and data shall not be exhibited or shown in any websites or social media or for any commercial purposes without Macquarie’s written permission. Therefore, no seller of goods like the goods shown herein has any right or authority to show or exhibit any images or data shown herein.
Date of Manufacture: 2006-09-15
Currently Configured for: 150mm
Current Equipment Status: Available
Location of Equipment: Greensboro, United States
Available date: Currently Available
| 8/7/23 - Apm | 12/2/23 - Qpm | 3/5/24 - Qpm | Spec /100 | |
| R/B Disto: | ||||
| NCE X (nm) | 31.8 | 31.1 | 25.8 | <60 |
| NCE Y (nm) | 27.9 | 27.3 | 34.7 | <60 |
| Focal: | ||||
| Focus (nm) | 0.006 | 0.141 | 0.073 | <200 |
| Rx (urad) | -3.483 | 0.171 | -4.721 | <10 |
| Ry (urad) | -6.136 | 5.259 | 2.272 | <10 |
| FPD (um) | 0.598 | 0.683 | 0.728 | < 0.45 |
| Astig (um) | 0.454 | 0.495 | 0.51 | <0.35 |
| Illumination: | ||||
| Uniformity: (%) | 1.33% @ 810 | 1.31% @ 802 | 1.41% @ 952 | <1.5 |
| Straylight: (%) | 1.09% | 0.89% | 0.89% | na |
FILE_TYPE 03
MACHINE_NUMBER 9876
MACHINE_TYPE /100
COMMENT TZ=factory
SW_RELEASE 080900
MAGIC_STRING MkuUWFU0{Ul
WAFER_STEPPER
OPTIONS
REFL_IMAGE_SENSOR KEY lgyKmHu{S5|
ARMS KEY pS4O4hxrHx{
PEP_1_PRODUCTIVITY_UPGRADE KEY C2hr1DExVjP
PEP_2_PRODUCTIVITY_UPGRADE KEY E4hxUltzzgD
RETICLE_ERROR_COMPENSATION KEY ez9vMVMFY8K
LSQ_DISTO_MODEL KEY IxRhQfwj62J
MARK_SENSOR KEY ElVc1Qr|W4h
BATCH_STREAMING KEY YK4ij9z6CUF
INTENSITY_2 KEY L|w4XNJ9Ugs
FAST_TTL_ALIGNMENT KEY tknzjkZKnKA
PEP_LEVEL_ALIGNMENT_1 KEY qCGZvxhQBEl
PEP_WAFER_SWAP_4 KEY |pxmZu8e3N1
SCRIBELANE_MARKS KEY 0VjtlFpFGp{
LIBRARY_CONFIG_3 KEY yjLl|k3gsC8
VISUAL_ALIGNMENT_CAMERA KEY |hs|lR3waC1
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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