Macquarie Semiconductor and Technology on behalf of Qorvo US, Inc.

ASML PAS 5500/100D

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Asset ID: 205005

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ASML

PAS 5500/100D

i-Line Stepper

Lithography Equipment

Equipment details:

Date of Manufacture:

Currently Configured for: 150mm

Current Equipment Status: Available

Location of Equipment: Richardson, United States

Available date: Currently Available


Description:

FILE_TYPE 03

MACHINE_NUMBER 8545

MACHINE_TYPE  /100

COMMENT TZ=factory

SW_RELEASE 080900

MAGIC_STRING NeyEWFU0{UN

WAFER_STEPPER

OPTIONS

SECS KEY Y|VcVAmCCVk

REFL_IMAGE_SENSOR KEY Y|VcVAm8SVk

PEP_1_PRODUCTIVITY_UPGRADE KEY r1DExVDpC2h

PEP_2_PRODUCTIVITY_UPGRADE KEY 6Xp{lpSzgjE

RETICLE_ERROR_COMPENSATION KEY ez9vMVMFY8K

FLATNESS_MODEL KEY wRRhwXm4D8R

LSQ_DISTO_MODEL KEY UhOjc0RwxPx

MARK_SENSOR KEY ElVc1Qr|W4h

BATCH_STREAMING KEY lgK4jj9z78U

INTENSITY_2 KEY L|w4XNJOVgs

FOCUS_MONITORING KEY Vk80rELRgFz

FLEXIBLE_SIGNAL_TOWER KEY tFYnAD9Bkio

FOCAL_ADJUSTMENT KEY lgK49L3zFwU

EXTENDED_EXPOSURE KEY Y05F|7w29VF

FAST_TTL_ALIGNMENT KEY q5kl|kb8kov

PRODUCTIVITY_MONITORING KEY yr1{AOVU|Fp

RELIABILITY_MONITORING KEY KD3xP|hwE6w

SLOT_INTEGRITY KEY {KTe9i{FY8K

PEP_LEVEL_ALIGNMENT_1 KEY KCIhPxhwB6l

PEP_WAFER_SWAP_4 KEY NHvwZu2W3VX

SCRIBELANE_MARKS KEY z5kQlVlPSWc

VISUAL_ALIGNMENT_CAMERA KEY zhs|lR3wii1

MULTI_STEP_IMAGING KEY 4LQCFfTxtFp

SLOT_INTEGRITY_SMALL_WAFERS KEY z2u|lxXwWqS


Product images

The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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