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Asset ID: 210857

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Metrology Equipment

Equipment details:

Date of Manufacture:

Currently Configured for: To be determined

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Yorktown Heights, United States

Available date: Currently Available

 Manufacturer: JEOL Ltd

 Model: JSM-6400F Scanning Electron Microscope (SEM)

 Serial number: SM160017-49


The JEOL JSM-6400F is a scanning electron microscope with a field emission gun and maximum accelerating voltage of 30 keV. non-operational


Original date of purchase or date of mfg: circa 2001

Last Date Operated: approx 2010



JEOL JSM 6400F Feature

1)Resolution: 1.5 nm at 30 kV and at 8 mm WD

2)Magnification: 10x to 500 000x

3)Probe current: 10 x 10-12 to 10 x 10-10 A

4)Electron gun: Cold-cathode field emission

5)Detectors: Scinitillator/photomultiplier

6)GW electronic system 47 backscattered detector

7)Accelerating Voltage: 500V to 30 kV

8)Specimen stage: fully eucentric goniometer stage

a)Movements: x = 100 mm; y= 110 mm; z = 34 mm

b)Tilt: -5 deg. to 60 deg.

c)Rotation: 360 deg. endless

9)Specimen exchange: by airlock: up to 150 mm dia. Specimen holder

10)By stage drawout: 200 mm dia. Or larger specimen holders

11)EDS detector: Si(Li) (30mm2) Prism 2000 with Imix acquisition system allowing Be detection

12)EBSD detector: Oxford HKL allowing crystallographic orientation

Product images

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