Macquarie Semiconductor and Technology on behalf of Intel Resale Corporation
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ECD (Electro Chemical Deposition)
Date of Manufacture:
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Portland, United States
Available date: Currently Available
|
Module |
Details |
|
Fixloader |
TDK (v9.2) Non mapping, moving nozzle w/ nitrogen purged FOUPs – 3 LPs |
|
Control PC’s |
2 proteus PC’s, Chase & main |
|
FFU |
SABRE FFU and SABRE ANL FFU |
|
Front End Robot |
Vortex with traverser to access 3 LPs |
|
Back End Robot |
Vortex Max |
|
Transfer Module |
RTM |
|
Load Locks for VPM |
Inbound and outbound load locks |
|
VPM |
One plasma chamber with 4 pedestals and two plasma sources |
|
Anneal Chambers |
5 chambers Gas Box Hot Plate Cold Plate Carrier arm (Fork carrier) |
|
Aligner Station |
Vortex Aligner |
|
Transfer Station |
Transfer Station |
|
Plating Cell |
VAN assy on Sabre Extreme plating cell |
|
Anode chamber |
SAC – separated anode chamber Charge plate |
|
Membrane |
Cationic membrane |
|
HRVA plate |
dHRVA |
|
Insert |
Insert is in cell, mounted above HRVA |
|
Clamshell |
Vacuum/pressure clamshell Optical open sensor Vacuum close sensor |
|
Cone |
2 wiper seals for use with vacuum/ pressure drive Cone pusher assy backside O-ring |
|
Cylinder |
Large shaft cylinder |
|
Cup |
Cup assembly |
|
Lift Controller |
Sel G lift controller |
|
AAE |
AAE assy’s - Cel1, Cell 2/3 Robot Motor Controller Bearings |
|
IDEC Box |
No smart relay box. Vacuum level close sensor used |
|
PEM |
O-ring style PEM chuck EBR arm nozzle PEM controllers PEM motor spindles |
|
Dosing system |
Dosing system hardware and controls; Dosing control Dosing system PNL NOWPAK Dosing system kit |
|
CDM Module |
CDM module, Syringe controllers. Flow switches & Valves; Chem Dilution Mod Assy CDM module plumbing kit CDM sensor kit |
|
Bath Module |
PS Reservoir Assy Ultrasonic Level Sensor PVDF Heat Exchanger/ Dual PVDF Heat Exchangers for newer tools or upgrades |
|
Plating Pumps |
Plating pump |
|
|
Flow meters |
|
Invertor |
Frequency invertor used where applicable |
|
Aspirator Pump |
Diaphragm pump |
|
Heater/ Chiller |
HX300, TF10000 |
|
SIOCs |
SIOC’s; Wafer Wand Bath Plating Post-plating Anneal |
|
Controllers |
1x System controller 3x Module controllers (one Node for VPM portion of tool) AFA controller |
|
E -Net |
2 E-net hubs and cabling setup |
|
CCB |
PULST Plating assy |
|
AE PPS |
Power supply: E-Wave I or E-Wave II |
NOTE: Tool configuration shown is accurate to the knowledge of Intel Resale Corporation. Actual configuration may vary. All sales are “as is” and buyer is advised to conduct its own inspections. Other names and brands may be claimed as the property of others.
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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