Macquarie Semiconductor and Technology on behalf of Macquarie Semiconductor and Technology Inc. Taiwan Branch - UMC

Tokyo Electron Ltd. (TEL) Tactras Vigus - Chamber Only

Disclaimer

The images and data contained herein is owned by Macquarie and is intended for use only by potential purchasers of goods shown herein. Except for such permitted usage, no other use of the images and data is permitted and such images and data shall not be exhibited or shown in any websites or social media or for any commercial purposes without Macquarie’s written permission. Therefore, no seller of goods like the goods shown herein has any right or authority to show or exhibit any images or data shown herein.


Asset ID: 209767

Enquire about this product Print spec sheet

Tokyo Electron Ltd. (TEL)

Tactras Vigus - Chamber Only

Dielectric Etch

Etch/Ash/Clean - Plasma Processing

Equipment details:

Date of Manufacture: 2016-01-01

Currently Configured for: 300mm

Current Equipment Status: Available

Location of Equipment: Tainan 744, Taiwan

Available date: Currently Available

Damage/Missing parts list, please inspect tool to reconfirm.

Dry pumps and customer provided items not included on sales.

Inspect to confirm configuration and condition.

Chamber A/E/F for sales ONLY


Install Type: TTW 

OEM MFG Date is 2016Y

Install Date is 2016Y

Date of Last PM is 2018/9/25

The System not On-Line

All Cables are present 

Pre-Aligner 

Mini-Environment

System SW (OS) version is 5.60

System SW (App) version is5.60

SEMI Std Options is E84

Communication Interface is GEM

Product images

The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


Learn more -

Enquire about this product

I agree to receive further communication from Macquarie Group Limited in accordance with its Privacy Policy, as amended from time to time.

Related products

No results message:
Displayed when filters returns no results.

We couldn't find any items that match your criteria.

Please try a different keyword.

Service unavailable:
Displayed when filter service cannot be reached.

Sorry, this service is currently unavailable.

Please try again later.

Get in touch

Have a question for our team?

Ask about our equipment solutions, ranging from Macquarie equipment inventory sales, sourcing programs, surplus disposition options, and direct equipment purchases.

I agree to receive further communication from Macquarie Group Limited in accordance with its Privacy Policy, as amended from time to time.