Macquarie Semiconductor and Technology on behalf of Macquarie Semiconductor and Technology Inc. Taiwan Branch - UMC

ASM International Eagle XP EmerALD


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Asset ID: 205091

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ASM International

Eagle XP EmerALD

ALD (Atomic Layer Deposition)

Deposition Equipment

Equipment details:

Date of Manufacture: 2012-01-01

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Tainan 744, Taiwan

Available date: Currently Available


Inspect to confirm configuration and condition.

The mainframe has been removed to other fab, so it is impossible to determine whether the remaining parts are damaged or can used adn there is only one chamber(EmerALD 3000) left on this equipment.

Configuration :

Tool Model : XP Platform

System SW(OS) version is Ver 1. 58a1-001

All cables are present

Have missing /damaged parts need inspection to confirm.

Robot Type is Yawuski

Power Supply & AC Dist Box : P/N 1060-625-01

Backing Pump(s) : ALD/LL/WHC is EDWARDS-IXH1210


Facility Requirements :

CDA LLC PN2 : 403

DIW : 2.95

Vacuum Load Port vacuum : -86.2

Gas LLC Pressure : 0.56/0.209 MPA

FI : 100 Pa

Ar : 500 SCCM

N2 : 500 SCCM

Ar : 3 SLM

Differential : 3.5 Pa

Product images

The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.

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