Delatech Inc. 858 - V2

Equipment details:

Date of Manufacture:

Currently Configured for: N/A

Current Equipment Status: Available

Location of Equipment: Caldwell, United States

Available date: Currently Available

DOMESTIC SALE: Only offers from US entities will be considered. Seller will not clear the equipment for export or act as Exporter of Record from the United States.

Quantity : 2

he Delatech CDO 858/859 Exhaust Gas Scrubber has long been considered the standard for Advanced Chemical Vapor Deposition (CVD) Process gas abatement, and has been effectively used with all PECVD, LPCVD & MOCVD process gases.  Delatech scrubbers are also widely used in Thin Film processes. This versatile gas scrubber utilizes a combination Thermal Oxidation Chamber and a Primary/Secondary Cooling Wet Scrubbing Chamber to effectively abate toxic, flammable and corrosive gases.

CDO 859 Reconditioning Process (high level)

• Thermal chamber & wet scrub assembly is removed, decontaminated and cleaned.
• Spray nozzles checked for proper flow rate and repositioned for optimum coverage.
• Scrubber balls, O-rings, and seals are cleaned and/or replaced.
• Recirculation unit is cleaned — components checked and recalibrated if necessary.
• CDO is then reassembled, functions are tested, sensor/alarms are checked.
• Gas Scrubber is tested at full temperature for 24 hours to ensure optimal working order.
• All systems are backed by CSI’s 6 month warranty

Standard Features

• 1, 2, or 4 inlet nozzles (allowing up to 4 connections to process chambers, process tools, or vacuum pumps)
• Thermal Reaction Chamber features a resistive heating element.
• Primary and Secondary wet cooling/scrubbing sections.
• Demister Washing System provides automatic cleaning
• Exhaust Moisture Suppression System.
• Liquid level detection.
• Tool interlocks to process tools

Available Options

• Cooling/Scrubbing Recirculation
• Sump Pump
• Cabinet Exhaust Alarm
• CSI Designed “U” Drain and Cooling Nozzle Assembly (see photos above)

 Delatech CDO Selection Criteria

• Mixture of Gases
• Individual & Total Gas Flow Rates
• Duty Cycle
• Single Pass or Water Recirculation
• Number of Ports Desired ( 1 – 4 )
• Desired Options