Macquarie Semiconductor and Technology on behalf of Micron Technology, Inc. (VA)
Date of Manufacture:
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Manassas, United States
Available date: Currently Available
Probe Station Performance
X-Y Stage
Travel: 301mm x 301mm (11.9 in. x 11.9 in.)
Resolution: 0.1 µm (0.004 mils)
Repeatability: ≤ 2 µm (0.08 mils) Speed: > 51mm/sec (2 in./sec.)
Accuracy: ≤ 4 µm (0.16 mils)
Bearings: Precision ball
Z Stage
Travel: 10.0mm (395 mils)
Resolution: 1 µm (0.04 mils)
Repeatability: ≤ 3 µm (0.12 mils)
Speed: >15mm/sec (0.6 in./sec.)
Lifting capacity: ≤ 15kg (33 lb.) *
*Measured at edge of 300mm chuck
Theta Stage
Travel: ± 7.5 degrees
Resolution: 0.5 µm (0.02 mils)*
Repeatability: ≤ 3 µm (0.12 mils)*
*Measured at edge of 300mm chuck
Chuck
Size: 304mm (12 in.) diameter
Material: Nickel or gold-plated aluminum
2 integrated auxiliary stages: Multi-Zone vacuum controls
Flatness: thermal chuck < 30 µm; non-thermal 15 µm
Platen
Z lift range: 3mm (0.12 in.)
Z lift type: Precision 4-point Linear
Repeatability: ≤ 3 µm (0.12 mils)
System includes
Wafer loading support with Roll-out chuck
Anti-vibration system
Storage area for computer controller & accessories
Castor wheels, and System leveling feet.
Typical Probe Station Configuration
Optics Bridgemount
System Controller
Microscope
- Optem A-Zoom
- Mitutoyo FS60
- Olympus StereoZoom
Positioners
Probes
Cables & Accessories
Thermal Chiller/Controller
Video System
Facility Requirements
Vacuum: 400mm (15 in.) of Hg min.
Dry air purge: (thermal systems only) 3 liters per sec.
(6 SCFM) with dew point of <-65ºC Compressed air : 0.5 litres/sec (1-CFM @ 85 psi. min.)
Power: 115 V @ 2 A, 230 V @ 1 A 50/60Hz
Dimensions
Station: 132cm (W) x 113cm (D) x 108cm (H) (52 in. x 44 x 41 in.)
Net weight: 780 kg (1,720 lb.) including optics bridgemount
Regulatory Compliance
All S300 series stations conform to CE mark and are ETL listed.
For More Information
Refer to the Nucleus Prober Control Software data sheet for more information on station control software.
Refer to S300 Configuration Guide for more information on accessories to complete your system.
S300 Accessories
Cascade Microtech can provide these S300 accessories and many more:
High Stability Optics Bridge Mount
Large Area Optics Bridge Mount
Triaxial Connection Panel (for High Stability Mount only)
Probe Card Holder (MicroChamber version)
Computer Accessory Platform Kit (for computer monitor, keyboard, mouse & joystick)
Video Monitor/Accessory Platform
Thermal Controller and Chiller Packages -55 to 200ºC, -55 to 300ºC, 0 to 200/300ºC, Amb. to 200/300ºC
FOUP Wafer Loader available
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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