Macquarie Equipment Trading on behalf of Macquarie Finance Korea Co., Ltd. 3237

Rigaku MFM310

Asset ID: 10355

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Rigaku

MFM310

X-ray Reflectivity (XRR)

Metrology Equipment

Equipment details:

Date of Manufacture:

Currently Configured for: 300mm

Current Equipment Status: Available

Location of Equipment: San Jose, United States

Available date: Currently Available

1. Automatic Wafer handling robot system with 200mm and 300mm wafer handling capability and wafer pre-aligner.
2 . Two 300mm FOUP load ports with FOUP ID readers and control software.
3. X-ray generator and Cu COLORS beam module for XRR and XRF measurements.
4. X-ray generator and Mo COLORS beam module for XRF measurements.
5. Sample stage with vacuum chuck for 200mm and 300mm wafers.
Stage motion is computer controlled for axes X, Y, 0 and Z.
6. Highly accurate and precise goniometer with direct sensing optical encorder system
7. Control/and data processing system ccmsisting of:
- Control computer -with Windows XP, LCD monitor
- Measurement software for XRR and XRF
- Data processing software for XRR and XRF
8. Air cooling Chiller
9. Center chip for stage calibrartion
10. Isolated Stone Base for optic mechanism.
11. Cognex Pattern recognition
12. Anti-vabration structure
13. GEM 300 communication software (Rigaku standard specification)

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The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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