Macquarie Equipment Trading on behalf of Micron Technology, Inc. (VA)
Date of Manufacture: 2007
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Manassas, United States
Available date: Currently Available
Configuration. Audit to verify.
Vertical MLD AlO/HfO TELINDY-B for 300mm Wafers 1.Base Unit for AlO/HfO MLD Process.
Including:
Cabinets / Units / Controllers Included
- Furnace Cabinet' (With Scavenger)
- Power Supply Unit (U/P Box)
(Including Control Unit, Transformers, SCR, and Breaker Unit)
- Main Controller (WAVES)
- Temperature Controller
- CAssette and Wafer Handling Automation Included
- Auto Tube Shutter
- Boat Elevator w/Boat Rotation Mechanism
- Wafer Load Automation
- Load Port System
- Cassette Load Automation
- 16 FOUP Stocker
- US Safety (S2-0302,S8-0999)
MLD AlO/HfO Specific Options
- Integrated Gas System for AlO/HfO Process 1 Included)
- Purge N2 (gas line)
- TEL made bubbler unit for TDMAH precursors
- TEL made bubbler unit for TMA precursor
- Ozonizer unit
- N2 Load Lock Option 1 Included
- O2 Analyzer - NGK SH-304
- N2 Gas System
- Low Temperature heater with RCU (VMM-56-201)
- Vacuum foreline configuration with stainless steel
manifold.
- Including normal temp Vacuum Gage
- Dual Boat Operation 1 Included
- Optional Gas Box
- Smoke detector and signal interface (dry contact)
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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