Macquarie Semiconductor and Technology on behalf of Micron Technology, Inc. (VA)

Tokyo Electron Ltd. (TEL) TELINDY-B

Asset ID: 209953

Print spec sheet

Tokyo Electron Ltd. (TEL)

TELINDY-B

Vertical Furnace

Furnaces/Diffusion Systems

Equipment details:

Date of Manufacture: 2008

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Manassas, United States

Available date: Currently Available

Section 1. Tool General Information 
Micron MISTI/LID #  TELF676300
Vendor Tool Serial #  R00000825029
Month / Year of Tool Move In (MM/YYYY)  27-Feb-08
Tool Excess Date (MM/DD/YYYY) 9/1/2022
Tool Current Status In production
Tool working condition before deinstall Working
Tool Location  Cleanroom
Any modification/conversion/refrofit was perform to the tool? Yes
    
Section 2. Move-out constraint 
Any layout/move-out path constraint No
If there is any move-out path constraint, please inform site reuse planning immediately and propose tool ID swap.   
Reuse tool configuration template needs to be populated based on the correct tool ID proposed for tool transfer.
    
Section 3. Tool Specific Information 
OEM  TEL
Tool Model  INDY
Process  LPOX
Software Version (include revision #) 8.09 REV 000 
System Power Rating  480 AC 3-Phase/120 AC 1 Phase
Loading Configuration  16 slot cassette storage
    
Tool under OEM service contract?    No


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