Macquarie Semiconductor and Technology on behalf of Micron Technology Taiwan, Inc. (F11)

Tokyo Electron Ltd. (TEL) TELINDY Plus Oxide

Asset ID: 209833

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Tokyo Electron Ltd. (TEL)

TELINDY Plus Oxide

Vertical Furnace

Furnaces/Diffusion Systems

Equipment details:

Date of Manufacture: 2010

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Taoyuan, Taiwan

Available date: Currently Available

Tool config is based on original PO, please verify tool details at tool inspection

Process: Oxide

Software Version: V6.07 VER:002

System Power Rating: 120V & 480V

Loading Configuration: 4 lots Loading

General Specification

Safety Specification: SEMI S2-0703/CE

Heater Model: Low-Temp. VMM-56-201 4zone / 150-600 (C) 

Process Condition: LP

Maximum Operating Temperature(C): 250-300

ART Control: None

N2 Load Lock: Yes

Wafer Type: 300mm-Si SEMI STD-Notch

Qty. of Production Wafers: 100

Boat Operation (Handling Position): 2 Boat Type (B/E)

Software Version (WAVES): Ver.6.07 Rev.002

Seismic Isolation Configuration: None

Dewpoint Meter for N2 Load Lock: None

Loading Area Light: White (LED)

RCU Duct Length FNC - RCU: N/A

Ionizer Maker / Model: None

Chemical Pre-filter (for Acid): None

Chemical Pre-filter (for Alkali): None

Chemical Pre-filter (for Hydrocarbon): None

Chemical Pre-filter Location: N/A

Side Maintenance: None

O2 Density control for N2 Load Lock: Yes

N2 Boat Shower Wafer Cooling: Yes

Furnace Temperature Controller: Model560A

Carrier Type: FOUP / 25slots SEMI STD

FOUP Maker / Model: Entegris / A300

Carrier Stage Capacity: 16

Info Pad A,B: Pin

Info Pad C,D: Pin

Fork Material: Al2O3+PEEK

W/T Type: 1+4 Edge Grip

W/T Auto Teaching: Yes

Furnace Exhaust Connection Point: Top Connection

Cooling Water Connection Point: Bottom Connection

RCU Duct Connection Point: N/A

Gas Specification

IGS Type: IGS 1.5"W-seal rail-mount

IGS Maker: Fujikin

Tubing Bends: Bend (Less than 90deg.)

IGS Final Filter: PALL(SUS)

IGS Regulator: CKD

IGS MFC Maker / Type: HORIBA STEC / Digital

IGS Press. Transducer: Nagano

Liquid Source Vapor System Maker / Model: 

Liquid Source Vapor System Maker / Model: HORIBA STEC / LSC F730 Series

Auto-Refill System Maker / Model: SCHUMACHER / CG400

Auto-Refill System Provided By: Customer

Refill System Tubing Interconnect By: Customer

Ozone Delivery System Maker / Model: MKS / AX8575-29

Ozone Delivery System Provider: Customer

External Torch Unit: N/A

Water Vapor Generator (WVG): N/A

PAC: None

Incoming Gas Connection Point: Bottom Connection

Gas Vent Connection Point: None

Exhaust Vent Connection Point: Bottom Connection

Gas Unit Exh. Connection Point: Bottom Connection

Process Gas Exhaust Connection Point: Bottom Connection

Exhaust Specification

Vacuum Gauge - Press Ctrl: MKS (Hot) Capacitance Manometer

Vacuum Gauge - Press Monitor (133kPa): MKS (Hot) Capacitance Manometer

Vacuum Gauge - Pump Monitor: MKS (Hot) Capacitance Manometer

Main Valve: CKD-VEC

Pump Maker / Model: EDWARDS / IXH-1820

Pump Provided by: Customer

Abatement System Type: Burning Type

Abatement System Maker / Model: Edwards / ATLAS-TCS 

Abatement System Provided by: Customer

N2 Dilution Unit Provided by: No NDU

Pump Power: Customer's Facility Provided

Pump Control Unit Setting Location: Power Box

Pump-FNC Vacuum Piping Provided By: Customer

Exhaust Pressure Control for AP Process: N/A

Exhaust Pressure Controller for AP Process Maker / Model: N/A

Vacuum Exhaust System: 4inch Pipe

Trap: N/A

Vacuum Pressure Controller: CKD-VEC

Burn Out Unit: N/A

Condenser: N/A

Reactor Specification

Quartz Meterial Requirement: Electric Fused

Quartz Provided by: Customer

Quartz Vendor Requirement: None

SiC Provided by: N/A

SiC Vendor Requirement: N/A

Liner Tube (AP): N/A

Process Tube (AP, AP+Sub-AP): N/A

Outer / Inner Tube Material (LP): Quartz / Quartz

Inner Tube Type (LP): Fixed top plate Narrow slit, 5mm gap (special ,see below)

Inner T/C: Outer Tube interior wall type (for CVD)

Tube Sealing: O-Ring

Manifold Heater: Yes

Switch Valve for Manifold Cooling Water: Yes

Soft Backfill Injector: Yes

Boat Type: 117 slots Ladder(8mm pitch)

Boat Material: Quartz

Boat Rotation: Yes

Pedestal Type: Quartz

Turn Table Type: Inconel

Cap Heater: Yes

Auto Shutter: Shutter Purge Type

Earthquake Countermeasure: None

Power Specification

Voltage 3phase: 480VAC

3phase connection type: Star Connection

Voltage Single-phase: 120VAC

Single-phase connection type: Grounded

Frequency: 60Hz

Wattmeter Maker / Model: None

Control Power UPS provided by: Customer

Control Power UPS type: Fab-wide system

UPS Input Voltage / Output Voltage: N/A

Power Cable Input Entrance Location: Power Box Top 

FNC - Power Box: 30m

Power Box - RCU: N/A

Power Box - Pump Unit: 30m

Gas Box - Refill System (if used): 30m

Power Box - WVG CTRL Unit (if used): N/A

FNC - WVG CTRL Unit (if used): N/A

Gas Box - Abatement System (if used): N/A

Power Box - Ozone Delivery System (if used): 30m

Power Box - UPS (if used): N/A

Wiring by: Customer

Conduit/Raceways provided by: Customer

Interface Specification

Host Communications: Comply with GJG

Equipment Host I/F Connection: Power Box Top HSMS (10Base-T/100Base-TX)

Ingenio: Yes

OHT Capability: Yes

AGV Capability: None

RGV Capability: None

PGV Capability: None

PIO I/F Location: FNC Top

PIO Provided by: Customer

PIO Maker /Model: Hokuyo / DMS-HB1-Z

Carrier ID Reader Writer Type: RF

CIDRW Load Port: Read


CIDRW Maker / Model: Keyence / BL601

CIDRW Provided by: TEL

CIDRW Tag Orientation: None

EEC (Equipment Engineering Capability): None

Customized Management Signals (for WAVES): WAVES

Signal Tower Model: LOUGWB-24-4 

Signal Tower Colors (from the Top): Red/Yellow/Green/Blue

Signal Tower Location: Front Panel/FilledcType

Front Operation Panel: None

MMI and Gas FlowChart: Gas Box

Indicator Type: Selete

Operator Switch: Operator Access / White Cover with Orange Light

Pressure Display Unit (Gas Inlet / Vacuum): MPa / Torr

Cabinet Exhaust Pressure Display Unit: Pa

Warning Label: Traditional Chinese

Other Specification

Furnace (Exh/Box,Gas/Box included): Main-Fab

Power Box: Sub-Fab

Pump: Sub-Fab


Step Up Transformer: N/A

Step Down Transformer: N/A

Ozone Delivery System: Main-Fab

WVG Controller: N/A

Auto-Refill System: Main-Fab

UPS: None

Other Unit Location: N/A

Gas Leak Detector: Yes

Gas Leak Detector Provided By: TEL

Gas Leak Detector Maker: Riken / GD-K77D-A

Gas Detector Power: 120VAC

Gas/Chem Configuration 

MFC A1: Ar Gas Flow [SLM] Full-Scale 10

MFC NA: N2(GB) Gas Flow [SLM] Full-Scale 2

MFC NC: N2(GB) Gas Flow [SLM] Full-Scale 30

MFC NR: N2(GB) Gas Flow [SCCM] Full-Scale 50

MFC N1: N2(GB) Gas Flow [SLM] Full-Scale 50

MFC N2: N2(GB) Gas Flow [SCCM] Full-Scale 500

MFC N3: N2(GB) Gas Flow [SLM] Full-Scale 20

MFC N4: N2(GB) Gas Flow [SCCM] Full-Scale 500

MFC N5: N2(GB) Gas Flow [SLM] Full-Scale 5

MFC N6: N2(GB) Gas Flow [SLM] Full-Scale 1

MFC O2: N2(GB) Gas Flow [SLM] Full-Scale 20

MFC Y1: N2(GB) Gas Flow [SLM] Full-Scale 5

MFC XV1: N2(GB) Gas Flow [SCCM] Full-Scale 500

MFC NL: N2(GB) Gas Flow [SCCM] Full-Scale 1000

MFM_Z1: N2(GB) Gas Flow [SLM] Full-Scale 15

MFC NBS: N2(GB) Gas Flow [SCCM] Full-Scale 400

GEN1N2: O3 GEN_N2 [SCCM] Full-Scale 5

GEN1O2: O3 GEN_O2 [SLM] Full-Scale 30

Damage/Missing parts list

Cannibalized- Thermocouple Qty 1

Please inspect tool to reconfirm

Dry pumps and customer provided items not included on sales

Product images

The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.

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