Macquarie Semiconductor and Technology on behalf of Macquarie (Asia) Pte Ltd. Taiwan Branch - UMC
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Date of Manufacture: 2013-01-01
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Tainan 744, Taiwan
Available date: Currently Available
The equipment use of destructive methods to deinstallation the equipment.
Damage/Missing parts list, please inspect tool to reconfirm.
Dry pumps and customer provided items not included on sales.
Inspect to confirm configuration and condition.
Software Version : Ver.6.07
System Controller is Model 780
The last PM date is 2016/09/24
Off-line date is 2017/11/06
Can produce wafers as is
All cables are present
Platform Type is TELINDY PLUS I-RAD
Process Type is Gate Oxide/SiO2
Temperature Range is Mid Temp 500-800 C
Wafer Handling :
Wafer Type is 300 mm
Carrier Type is 25 slot
Carrier Stage Capacity is special
WTU Type is 1+4 Edge Grip
Production Wafers qty are 100
Boat Operation is 1 Boat Type
Gas Panel Configuration :
MFD Make is ADVANCED ENERGY
Gas MFC Model MFC Size
N2 MFC-NX 50 SLM
O2 MFC-O1 20 SLM
HF MFC-XF1 5 SLM
N2 MFC-N1 10 SLM
N2 MFC-N2 10 SLM
N2 MFC-N3 5 SLM
N2 MFC-N4 10 SLM
N2 MFC-NL 1000 SLM
N2 MFC-NBS 400 SLM
N2 MFC-NR 500 SCCM
Reactor Configuration :
Quartz Material is Electric Fused
Quartz Provide is TEL
Process TUBE is I Red TUBE
TUBE Sealing is special O-ring
Boat Type is 117 slot
Boat Material is Quartz
Pedestal Type is Quartz
Auto shutter is shutter purge type
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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