Macquarie Semiconductor and Technology on behalf of Micron Technology, Inc. (VA)
Date of Manufacture: Jan - 2014
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Manassas, United States
Available date: Currently Available
Software Version: V6.07
System Power Rating: 480/120
Loading Configuration : 5
Furnace Module
I/O module
Exhaust Box
Gas Box
Power Box
| Section 1. Tool General Information | |||
| Micron MISTI/LID # | 1196403/H61 | ||
| Vendor Tool Serial # | S00001415054 | ||
| Month / Year of Tool Move In (MM/YYYY) | |||
| Tool Excess Date (MM/DD/YYYY) | 17-Sep-22 | ||
| Tool Current Status | In production | ||
| Tool working condition before deinstall | Working | ||
| Tool Location | Cleanroom | ||
| Any modification/conversion/refrofit was perform to the tool? | No | ||
| Section 2. Move-out constraint | |||
| Any layout/move-out path constraint | No | ||
| If there is any move-out path constraint, please inform site reuse planning immediately and propose tool ID swap. | |||
| Reuse tool configuration template needs to be populated based on the correct tool ID proposed for tool transfer. | |||
| Section 3. Tool Specific Information | |||
| OEM | TEL | ||
| Tool Model | INDY Plus | ||
| Process | HfSiOx | ||
| Software Version (include revision #) | V6.10 Rev.000 [i00C00-00000] | ||
| System Power Rating | 480V 3Phase | ||
| Loading Configuration | 18 Carrier Load - FOUP/25slots SEMI STD | ||
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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