Equipment details:

Date of Manufacture:

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Taoyuan, Taiwan

Available date: 6/2/2023

Process: TEOS

System, General Specification

Heater element Model: Mid-Temp VMM-56-002 5zone/500-1000
Process Condition : LP
Maximum Operating Temperature: 1000?
N2 Load Lock : Yes
Wafer Type : 300 SEMI STD-Notch
Qty. of Production Wafers: 117 slots Ladder
Boat Operation : 2 Boat Type / 2 Boat Operation
Software Version: 2.06

System, Furnace

Loading Area Light : White (LED)
Force Air Cooiling system: None
Side Maintenance : None
O2 Density control : NGK
SH-304 STANDRD
N2 Boat shower wafer cooling: installed
Furnace Temperature Controller : M560A

System, Wafer/Carrier Handling

Carrier Type : FOUP 25slots (STD)
Carrier Stage Capacity: 16
WTU Type : 1+4 Edge Grip
WTU alignment: None
WTU Teaching method: None

System, Gas Distribution

IGS Maker / Type : AREA
IGS MFC Maker / Type: AREA(Gas Panel)
IGS Press Transducer Maker / Type: NAGANO

System, Exhaust Specification

Vacuum Gage - 2 torr : None
Vacuum Gage - 10 torr : MYKROLIS
CMLH-31-150S6
Vacuum Gage - 100 torr : None
Vacuum Gage - 1000 torr : MYKROLIS
CMLH-11-150S06"
Main Valve : MKS-99C1274
Pump Maker/Model : EDWARDS
IH-1800"
Low vacuum valve : None
Trap : Disk Trap
Vacuum Pressure Controller: N2-ballast

System, Reactor

Process Tube (LP): Outer: ID448xH1360
Inner: Straig H1340
Outer/Inner Tube Material (LP) : Quartz
Inner Tube Type (AP): None
Inner T/C : Outer Tube interior wall type
Boat Materail/Type : Quartz
117 slots Ladder (8mm pitc
Boat Rotation : installed
Pedestal Materail/Type : Quartz Sand blast
OD300 H350 1fi
Auto Shutter : installed

System, Power Distribution

Voltage 3phase : 208VAC
Voltage Single-phase: 120VAC
Frequency : 60Hz

System, User Interface

Operation Panel : Front/rear Gas Box and Operation Panel Installed
Indicator Type : Superset
Operation software type: Linux

Gas Leak Detector

Gas Leak Detector Materail/Type : Riken
TEOS/CF3

System, Documentation

English Manuals CD-ROM with OEM

System, Fixture List, Gas

IGS maintenance Fixture: None
Vacuum Gauge :
VG2:10to rr
VG3:1000to rr
VG 1000torr