Macquarie Semiconductor and Technology on behalf of Micron Technology Taiwan, Inc. (F11)
Date of Manufacture: 2014
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Taoyuan, Taiwan
Available date: Currently Available
Model: UMA-2003-H120F-IM01
Process: 6500-35 GATE RESIST CURE
Tool config is based on original PO, please verify tool details at tool inspection
Basic System: UMA-2003-H120F UVC
Wafer Size: Capable of processing 300mm +/- 0.05mm (SEMI M28), 775 +/- 25um, notched wafers
Carrier: 2 FOUP (TDK TAS-300)
Interface: 2 FOUP (Continuous flow operation). With Semi compliant MENV and FIMS assemblies.
Carrier ID: Bar code
Communications Protocol: HSMS
EMO: Display and Main Unit (including attached Mini-environment) have front and back EMO, LAMP POWERSUPPLY UNIT FRONT SIDE
Interlocks: Power Supply Unit and Mini-environment have panel (cover) interlocks. Open lamp house
Cable Lengths: 15 meter cables run between the main unit and the Lamp Supply unit.
Signal Tower: Red/Yellow/Green
CL plate: Hp on the CL plate (with vacuum)
Detection sensor (port1, port2): The FOUP up and down a transmission sensor Installation
LAMP POWER SUPPLY UNIT: LAMP POWER SUPPLY UNIT
CHILLER UNIT
ROBOT Controller Unit
Bulk Gas: CDA Peak Flow=280, Ave Flow=5.4, Static pressure0.5～0.6M Pa
Bulk Gas: N2 FLOW10～501/min, Static pressure0.5～0.6Mpa
Bulk Gas: Vacuum：-80Ｋｐａ; Flow：40L/Min
Electric: 200V±10V 3PH 50/60Hz 175A
Electric: 200V±10V 3PH 50/60Hz 33A
Water supply: Water supply Temperature：10～25℃; Flow: 6L/Min(over); Pressure：0.5～0.6Mpa
Water supply: Water supply Temperature：25℃(following); Flow：60L/Min(over); Pressure：0.1Mpa(over)
Exhaust: Tool Exhaust：6m3/min; Lamp cooling：20m3/min; Lamp power supply Exhaust：7m3/min"
Safety Codes: Comply to S2-1102 and CE marked.
Damage/Missing parts list
Please inspect tool to reconfirm
Dry pumps and customer provided items not included on sales
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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