Ushio UMA-2003

Equipment details:

Date of Manufacture: 2014

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Taoyuan, Taiwan

Available date: Currently Available

Model: UMA-2003-H120F-IM01

Process: 6500-35 GATE RESIST CURE

Tool config is based on original PO, please verify tool details at tool inspection

Basic System: UMA-2003-H120F UVC, Qty 1

Wafer Size: Capable of processing 300mm +/- 0.05mm (SEMI M28), 775 +/- 25um, notched wafers, Qty 1

Carrier: 2 FOUP, Qty 1(TDK TAS-300)

Interface: 2 FOUP (Continuous flow operation). With Semi compliant MENV and FIMS assemblies

Carrier ID: Bar code, Qty 2

Communications Protocol: HSMS, Qty 1

EMO: Display and Main Unit (including attached Mini-environment) have front and back EMO, LAMP POWERSUPPLY UNIT FRONT SIDE, Qty 4

Interlocks: Power Supply Unit and Mini-environment have panel (cover) interlocks. Open lamp house

Cable Lengths: 15 meter cables run between the main unit and the Lamp?Supply unit, Qty 1

Signal Tower: Red/Yellow/Green, Qty 1

CL plate: Hp on the CL plate(with vacuum), Qty 1

Detection sensor(port1,port2): The FOUP up and down a transmission sensor Installation, Qty1

LAMP POWER SUPPLY?UNIT: LAMP?POWER SUPPLY?UNIT

CHILLER?UNIT: Qty 1

ROBOT?Controller?Unit: Qty 1

Bulk Gas: CDA Peak Flow=280, Ave Flow=5.4, Static pressure0.5?0.6M??

Bulk Gas: N2?FLOW10?50????n, Static pressure0.5?0.6Mpa

Bulk Gas: Vacuum?-80???,Flow?40L/Min

Electric: 200V±10V? 3PH 50/60Hz?175A? for Tool

Electric: 200V±10V? 3PH 50/60Hz?33A? for Chiller Unit

Water supply: Temperature?10?25? Flow? 6L/Min(over) Pressure?0.5?0.6Mpa for tools

Water supply: Temperature?25?(following), Flow?60L/Min(over), Pressure?.1Mpa(over)for Chiller unit

Exhaust: 6m3/min

Lamp cooling?20m3/min

Lamp power supply Exhaust?7m3/min Qty 3

Damage/Missing parts list

Please inspect tool to reconfirm

Dry pumps and customer provided items not included on sales