Macquarie Semiconductor and Technology on behalf of Micron Memory Japan, K.K. (F15)
The images and data contained herein is owned by Macquarie and is intended for use only by potential purchasers of goods shown herein. Except for such permitted usage, no other use of the images and data is permitted and such images and data shall not be exhibited or shown in any websites or social media or for any commercial purposes without Macquarie’s written permission. Therefore, no seller of goods like the goods shown herein has any right or authority to show or exhibit any images or data shown herein.
Date of Manufacture: 2009-01-02
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Hiroshima, Japan
Available date: Currently Available
No Missing or damaged parts.
| OEM | EBARA |
|---|---|
| Tool Model | F-REX300S |
| Part Type | Part Description | Part number | Date of Change | Qty | Remark | |
|---|---|---|---|---|---|---|
| 1 | 2FJ Retrofit | 2011-05-29T15:00:00Z | ||||
| 2 | CO2 Retrofit | 2016-04-19 |
| Chamber Description | Chamber Chemicals Gases Used | |
|---|---|---|
| Chamber PolisherA | Polishing Unit | W7583 |
| Chamber PolisherB | Polishing Unit | PL6502/PL5111 |
| Chamber PolisherC | Polishing Unit | W7583 |
| Chamber PolisherD | Polishing Unit | PL6502/PL5111 |
| Chamber Cleaner1 | Roll Brush Unit | NH4OH |
| Chamber Cleaner2 | Roll Brush Unit | DHF |
| Chamber Cleaner3 | 2FJ Unit | NH4OH |
| Chamber S/D | Dryer Unit | DIW |
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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