Macquarie Semiconductor and Technology on behalf of Micron Memory Japan, K.K. (F15)
Date of Manufacture:
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Hiroshima, Japan
Available date: Currently Available
Tool has been de-installed and is stored in an off-site warehouse.
No photos provided by Fab15 due to the tool's conditions.
No shipping kits have been installed on tool.
No missing or damaged parts.
| EBRA |
| F-REX300S |
| Contact-W |
| 8-Jan-00 |
| AC200V 60Hz 3phase for System |
| 3 load port |
| Parent Compnt | Part Description | Detailed Description | Qty |
| Base System | Frex 300S | 4 head 4 platenpolishing system. Dry in Dry out | 1 |
| Nova 3090 Next Ready | Insitu Metrology System | 1 | |
| Monitor 1 Location | Front of tool | 1 | |
| Monitor 2 Location | Cleaner Side of tool | 1 | |
| Monitor 3 Location | Cart Mounted on Polishing Side of tool | 1 | |
| Front Light Tower location | Left Side | 1 | |
| Rear Light Tower location | Right Side | 1 | |
| Software | HMI | Human / Machine Interface, Version 8.2 | 1 |
| Endpoint Simulation Software | ME-20, Version 2.4.28.A | 1 | |
| Simulator Software Key | One Key supplied | 1 | |
| NOVA Interface software | Via File Server, Version 4.5r6b65 | 1 | |
| Factory Interface | WIP Delivery Type | OHT or manual delivery | 1 |
| Carrier | Entegris F300 | 1 | |
| E84 PI O Sensors and Cables | UPPER E84 Sensors & Cables, with E87 compliance | 1 | |
| E99 Carrier ID | Semi ver 010104 | 1 | |
| Docked E99 Reading Capability | FOUP Reader | 1 | |
| Frame Configuration | Metro ready right side of mini-environment | 1 | |
| Load Port Types | Semi Compliant MENV and FIMS Assmeblies | 3 | |
| Load Port Operator Interface | Standard | 1 | |
| Operator Access Switch | Yes | 1 | |
| Platen A | Platen Type | Ceramic (SiC), 10-150 RPM | 1 |
| Platen Pad | For shipment only | 1 | |
| Platen Pad Conditioner | Scan Dresser, 4.25" Diamond DR Disc attachment, Screw fixing type | 1 | |
| Platen End point | RECM & Friction | 1 | |
| Platen Insitu metrology | Insitu metrology | 0 | |
| Slurry Delivery | Injecter + HIC | 1 | |
| Line 1 | 50-500ml/min | 1 | |
| Line 2 | 50-500ml/min | 1 | |
| Line 3 | - | 1 | |
| Dresser DIW flow meter. | Flow meter | 1 | |
| Platen Cooling Flow Monitor | Installed on the platen cooling return line. | 1 | |
| Platen Cooling Temp Monitor | Temperature monitor installed on the platen cooling return line. | 1 | |
| Platen B | Platen Type | Ceramic (SiC), 10-150 RPM | 1 |
| Platen Pad | For shipment only | 1 | |
| Platen Pad Conditioner | Scan Dresser, 4.25" Diamond DR Disc attachment, Screw fixing type | 1 | |
| Platen End point | RECM & Friction | 1 | |
| Platen Insitu metrology | Insitu metrology | 0 | |
| Slurry Delivery | Injecter + HIC | 1 | |
| Line 1 | 50-500ml/min | 1 | |
| Line 2 | 50-500ml/min | 1 | |
| Line 3 | - | 1 | |
| Dresser DIW flow meter. | Flow meter | 1 | |
| Platen Cooling Flow Monitor | Installed on the platen cooling return line. | 1 | |
| Platen Cooling Temp Monitor | Temperature monitor installed on the platen cooling return line. | 1 | |
| Platen C | Platen Type | Ceramic (SiC), 10-150 RPM | 1 |
| Platen Pad | For shipment only | 1 | |
| Platen Pad Conditioner | Scan Dresser, 4.25" Diamond DR Disc attachment, Screw fixing type | 1 | |
| Platen End point | RECM & Friction | 1 | |
| Platen Insitu metrology | Insitu metrology | 0 | |
| Slurry Delivery | Injecter + HIC | 1 | |
| Line 1 | 50-500ml/min | 1 | |
| Line 2 | 50-500ml/min | 1 | |
| Line 3 | - | 1 | |
| Dresser DIW flow meter. | Flow meter with user configurable alarm settings. | 1 | |
| Platen Cooling Flow Monitor | Installed on the platen cooling return line. | 1 | |
| Platen Cooling Temp Monitor | Temperature monitor installed on the platen cooling return line. | 1 | |
| Platen D | Platen Type | Ceramic (SiC), 10-150 RPM | 1 |
| Platen Pad | For shipment only | 1 | |
| Platen Pad Conditioner | Scan Dresser, 4.25" Diamond DR Disc attachment, Screw fixing type | 1 | |
| Platen End point | RECM & Friction | 1 | |
| Platen Insitu metrology | Insitu metrology | 0 | |
| Slurry Delivery | Injecter + HIC | 1 | |
| Line 1 | 50-500ml/min | 1 | |
| Line 2 | 50-500ml/min | 1 | |
| Line 3 | - | 1 | |
| Dresser DIW flow meter. | Flow meter | 1 | |
| Platen Cooling Flow Monitor | Installed on the platen cooling return line. | 1 | |
| Platen Cooling Temp Monitor | Temperature monitor installed on the platen cooling return line. | 1 | |
| Polisher | Polisher Technology | Slurry and Pad | 1 |
| Polishing Head | 300mm AI Head Generation Ⅲ | 1 | |
| Pad Wafer Loss Sensor | Laser type | 1 | |
| Atomizer/Spray Bar | Ebara to provide bracket and atomizer bar. | 1 | |
| AI head flanges pins | Solid pin | 1 | |
| Cleaner Module | Special Chemical | Single chemical bulk line that will service all modules. | 1 |
| Cleaner Module 1 | Roll Roll Cleaner Type | Roll Brush | 1 |
| Chemical 1 Upper Control Valve | Recipe settable flow | 1 | |
| Chemical 1 Lower Control Valve | Recipe settable flow | 1 | |
| Chemical 1 Upper Flow Meter | User configurable alarm settings. | 1 | |
| Chemical 1 Lower Flow Meter | User configurable alarm settings. | 1 | |
| Special Chemical Upper | Needle valve | 1 | |
| Special Chemical Lower | Needle valve | 1 | |
| Special Chemical Upper | Flow Meter with user configurable alarm settings. | 1 | |
| Special Chemical Lower | Flow Meter with user configurable alarm settings. | 1 | |
| Megasonic | Nozzle | 1 | |
| Bevel Edge Cleaning | Yes | 1 | |
| Cleaner Module 2 | Roll Roll Cleaner Type | Roll Brush | 1 |
| Chemical 1 Upper Control Valve | Recipe settable flow | 1 | |
| Chemical 1 Lower Control Valve | Recipe settable flow | 1 | |
| Chemical 1 Upper Flow Meter | User configurable alarm settings. | 1 | |
| Chemical 1 Lower Flow Meter | User configurable alarm settings. | 1 | |
| Special Chemical Upper | Needle valve | 1 | |
| Special Chemical Lower | Needle valve | 1 | |
| Special Chemical Upper | Flow Meter with user configurable alarm settings. | 1 | |
| Special Chemical Lower | Flow Meter with user configurable alarm settings. | 1 | |
| Megasonic | No | 0 | |
| Bevel Edge Cleaning | No | 0 | |
| Cleaner Module 3 | Cleaner Type | 2FJ | 1 |
| Chemical 1 Upper Control Valve | Recipe settable flow | 1 | |
| Chemical 1 Lower Control Valve | Recipe settable flow | 1 | |
| Chemical 1 Upper Flow Meter | User configurable alarm settings. | 1 | |
| Chemical 1 Lower Flow Meter | User configurable alarm settings. | 1 | |
| Special Chemical Upper | Needle valve | 1 | |
| Special Chemical Lower | Needle valve | 1 | |
| Special Chemical Upper | Flow Meter with user configurable alarm settings. | 1 | |
| Special Chemical Lower | Flow Meter with user configurable alarm settings. | 1 | |
| Megasonic | No | 0 | |
| Bevel Edge Cleaning | No | 0 | |
| SRD | Spin Rinse Dryer | Yes | 1 |
| Safety Precautions | FM4910 Compliant | > 97% by weight FM 4910 approved materials of construction. | 1 |
| EPO | Twist to release | 1 | |
| Safety labels | English | 1 | |
| Secondary Containment | All mechanical connections | 1 | |
| Facilities | Installation Type | Not through the wall | 0 |
| Seismic support | Seismic support points listed | 1 | |
| Chemical Connection | Bottom | 1 | |
| Exhaust Connection | Top | 1 | |
| Gas Connection | Bottom | 1 | |
| Drain Connection | Bottom | 1 | |
| Bulk Supply Regulation | Point of use regulation for special chemical supply line. | 1 | |
| External Penetrations | Bulkhead fitting for inert gas | 1 | |
| External Penetrations | Dual containment for liquids | 1 | |
| Chiller | Communication interface | 1 | |
| Metrology | Nova Interface requirements | 1 | |
| Documentation | Operations Manuals | CD ROM | 1 |
| Maintenance Manuals | CD ROM | 1 | |
| Electrical Diagrams | CD ROM | 1 | |
| Plumbing Diagrams | CD ROM | 1 | |
| OEM parts manuals | CD ROM | 1 | |
| Documentation | Laser | Required class II documentation | 1 |
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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