Macquarie Semiconductor and Technology on behalf of Macquarie (Asia) Pte Ltd. Taiwan Branch - UMC

Dainippon Screen Mfg. Co. (DNS) SC-W80A-AVG

Asset ID: 215021

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Dainippon Screen Mfg. Co. (DNS)

SC-W80A-AVG

Spin On Glass (SOG)

Resist Processing Equipment

Equipment details:

Date of Manufacture: 1998

Currently Configured for: 200mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Hsinchu 300, Taiwan

Available date: Currently Available

HARD DRIVE WILL BE REFORMATTED. OPERATING SOFTWARE IS NOT INCLUDED.

Inspect to confirm configuration and condition and missing and damaged parts.


Original Ship Date:1998/11/30

Main Controller Type:NEC PC9801

SECS/GEM:Yes 

Is System On-Line? Yes 

Electrical Requirements:Yes

Can Produce Wafers AS IS? Yes

Any Known Field Modifications? Yes

All Cables Present? Yes

System Type:Dry Out


Key Common Options:Included?

Signal Lamp Tower:Yes

Bolt-On-SMIF:No

Integrated SMIF:No

Clean Room Manuals:No

Standard Manuals:No


Mainframe Items

Number of Cassette Stations:4

Cassette Mapping Capability:Yes

Number of Flip Stations:No

Number of Frontside Clean Stations:No

Brush Pressure Control:No

Brush Type:NO

Nozzle Type:Soft Spray Nozzle

Moving Arm for Nozzle:Yes

Megasonic Ultrasonic Option:No


Number of Backside Clean Stations:No

Brush Pressure Control:No

Brush Type:No

Nozzle Type:Soft Spray Nozzle

Moving Arm for Nozzle:Yes

Megasonic Ultrasonic Option:No

Edge Handling Spin Chuck:No

Number of Hot Plates:6

Hot Plate Max Temperature:250°

SC1 Mixing Cabinet:No

Softspray Unit:Yes

Two-Stage Reversing Unit:No

Chemicals Used:IPA


Legend for Machine Layout

Loader:LU

Hot Plate:HP

Wafer Transfer Unit:TR

Product images

The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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