Macquarie Semiconductor and Technology on behalf of Micron Technology Utah, LLC

Dainippon Screen Mfg. Co. (DNS) SU-3200

Asset ID: 209880

Print spec sheet

Dainippon Screen Mfg. Co. (DNS)

SU-3200

Single Wafer Processing

Etch/Clean - Wet Processing

Equipment details:

Date of Manufacture: 4/2018

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Lehi, United States

Available date: Currently Available

Process

 

 

CITRIC_PO

Software Version

 

 

V2.590STD00

 

 

 

220 AC 3-Phase 60HZ



Tool Frame with 12x CPLC chambers, 4x Side Cabinets 
IPA external cabinets
External cabinets
HF external cabinet
CITRIC external cabinets
N2 EFEM


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The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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