Macquarie Semiconductor and Technology on behalf of Macquarie Semiconductor and Technology Inc. Taiwan Branch - UMC

SEZ Group SP304

Disclaimer

The images and data contained herein is owned by Macquarie and is intended for use only by potential purchasers of goods shown herein. Except for such permitted usage, no other use of the images and data is permitted and such images and data shall not be exhibited or shown in any websites or social media or for any commercial purposes without Macquarie’s written permission. Therefore, no seller of goods like the goods shown herein has any right or authority to show or exhibit any images or data shown herein.


Asset ID: 209747

Enquire about this product Print spec sheet

SEZ Group

SP304

Single Wafer Processing

Etch/Clean - Wet Processing

Equipment details:

Date of Manufacture: 2004-01-01

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Tainan 744, Taiwan

Available date: Currently Available


The equipment use of destructive methods to deinstallation the equipment.

Damage/Missing parts list, please inspect tool to reconfirm.

Dry pumps and customer provided items not included on sales.

Inspect to confirm configuration and condition.

The DC Power supply is missing and Heater is damaged.

Install Type is Stand-Alone.

Manufacturer Date is 2004

Date of last PM is 2014

The system not On-Line  

SEZ Spin Processor Model is SP304

UI (Front) is present

Status Lamp is present

Chuck Size (Left) is 12

Chuck Size (Right) is 12

Ionizer system

No Flip Module

No End Point Detection System

Horiba concentration Monitor (HF Monitor)

ULPA Filter (Top of Main Unit)

FFU Replacement Date is 2013

Robot Support Plate is Present

Robot - CNTRL Filter Replacement Date is 2013

Suck Back Box w/NT flow meter & manual reset

Number of Load-ports is 2 std

Load-port Size (Left) is 12

Load-port Size (Right)  is 12

No Load-port Adapters (12->8)

No Wafer ID Reader

No RFID Reade

Chemical Module 1 is SC1

Chemical Module 2 is HF 49%

Chemical Module 3 is H2SO4

Chemical Delivery System (CDS) is CDS

Buffer System for Chemical Cabinet

No Bulk Chem Delivery system (BCD)_Active

No Bulk Chem Delivery system (BCD)_Passive

All Cables are present 

There are missing or damaged parts

Product images

The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


Learn more -

Enquire about this product

I agree to receive further communication from Macquarie Group Limited in accordance with its Privacy Policy, as amended from time to time.

Related products

No results message:
Displayed when filters returns no results.

We couldn't find any items that match your criteria.

Please try a different keyword.

Service unavailable:
Displayed when filter service cannot be reached.

Sorry, this service is currently unavailable.

Please try again later.

Get in touch

Have a question for our team?

Ask about our equipment solutions, ranging from Macquarie equipment inventory sales, sourcing programs, surplus disposition options, and direct equipment purchases.

I agree to receive further communication from Macquarie Group Limited in accordance with its Privacy Policy, as amended from time to time.