Macquarie Semiconductor and Technology on behalf of Micron Technology Taiwan, Inc. (F11)

LAM Research 2300 KIYO EX

Asset ID: 211051

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LAM Research

2300 KIYO EX

Polysilicon Etch

Etch/Ash/Clean - Plasma Processing

Equipment details:

Date of Manufacture:

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Taoyuan, Taiwan

Available date: Currently Available

Tool config is based on original PO, please verify tool details at tool inspection


Tool Model: KIYOEX


This tool is sold with

FI

MF

Chamber*1 (2300 STRIP45)

AC Rack

Gas up frame+pipe

Load port

Parts Box

Gas box


Chamaber- 2300 STRIP45 OPTIONS

Gas Box Inlet Option: Reg Filter Inlet Gas Panel

Gas Filters: Standard Filter

MFC Type: STEC SEC-Z313

Line 1 Gas Flow - On Board: 1000sccm

Line 1 Gas Type - On Board: N2

Line 2 Gas Flow - On Board: 5000sccm

Line 2 Gas Type - On Board: O2

Line 3 Gas Flow - On Board: 2000sccm

Line 3 Gas Type - On Board: Ar

Transducer type: Display

Chamber Isolation Valve: Barrier Seal Door

Gas Delivery Type: On-Board (3 Line)

Injector: Standard (-072)

Leak Check Port: No Leak Check Port

Non-Standard PM Feature: NSR102686C,IGS Dummy termn box ST45

Non-Standard PM Feature: NSR103327,UPG End-effector fingers

O-rings: Fluorosilicone

PM to Pump Interconnect: Pump to PM, 100ft

Pendulum Valve: Heated


Damage/Missing parts list

Damage- Load port surface foggy- Qty 3

Missing- Cooling station- Qty 1

Missing- Buffer station- Qty 2

Please inspect tool to reconfirm

The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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