Macquarie Semiconductor and Technology on behalf of Micron Technology Taiwan, Inc. (F11)
PECVD (Chemical Vapor Deposition)
Date of Manufacture:
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Taoyuan City, Taiwan
Available date: Currently Available
Tool config is based on original PO, please verify tool details at tool inspection
Tool is config with ETERNA TWIN Chamber A & ETERNA2 UV cure TWIN Chamber B & ETERNA TWIN Chamber C
Basic System
Technology: DCVD
Platform Type: Producer GT
Process: FUV
System Power Rating: 208/480 AC 3-Phase
Loading Configuration: 3 SELOP 7 25 WAFER FOUP (LOADPORT)
Tool Specific Information
ETERNA TWIN CHM A Chemicals/ Gases Used: NH3_SIDE2, NF3, AR_CLN, O2_LOW, O2_CLN, TSA, HE, NH3_SIDE1, H2O, AR_H2O
ETERNA2 UV cure TWIN CHM B Chemicals/ Gases Used: AR_TOP, AR_SH, AR_BTM, NF3, AR_CLN, O3
ETERNA TWIN CHM CChemicals/ Gases Used: NH3_SIDE2, NF3, AR_CLN, O2_LOW, O2_CLN, TSA, HE, NH3_SIDE1, H2O, AR_H2O
Load Port Types SELOP 7 25 WAFER FOUP
WIP Delivery Type OHT WIP DELIVERY
iPUP One iPUP for loadlock chambers
Local Center Finder
RPS Astron 6L RPS
Remote Components (REFERENCE ONLY)
Heat Exchanger SMC H2000(INR-498-012C): 2
SMC Chiller -20 (0190-32036):1
TSA/Purge N2/CO2 Cabinet: 2 set
UV Curing System and UV AC Rack: 1 set
O3 Generator: 1
Process Vacuum Pump CHA/C:Edwards iXH4550HT, CHB: Edwards iXH1820: 3
Buffer pump Edwards IH600L: 1
DAS escape Scrubber: 2
Damage/Missing parts list
Process Vacuum pump: CHA/C:Edwards iXH4550HT(Qty:2), CHB: Edwards iXH1820(Qty:1)
Buffer pump:Edwards IH600L(Qty:1)
Scrubber: DAS escape Scrubber (Qty:2)
Please inspect tool to reconfirm
Dry pumps and customer provided items not included on sales
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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